H_75nm_L1_65um_D_4um

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Unformatted text preview: 1523062360410734E-6 2.2868204863856538E-7+5.7887555010797595E-8i 1.602425872096302E-7+5.3481790765098684E-8i 9.666831809305364E-7-4.0473128418621797E-7i 1.8486588653167708E-4 9.822172649754964E-5 -9.170814479534276E-6 2.9759797808794324E-7+6.257347068780129E-8i 1.0264084318231156E-7+2.560822079103824E-8i 9.435421176856016E-7-3.643368988829003E-7i 1.7867502873074794E-4 9.022186502002065E-5 -6.962926390366567E-6 2.8961268395028584E-7+6.867101274326135E-8i 8.29859017178217E-8+2.351353760736363E-8i 9.82298024921313E-7-4.1146436906059825E-7i 1.7469884210591935E-4 9.187945251549562E-5 0 2.31311822180549E-7+9.685795322234882E-8i 7.952707702142963E-8+3.795608932430155E-8i 9.559944689950542E-7-4.483800118217582E-7i 1.715652599226047E-4 9.841165659456888E-5 0 2.0915615116471267E-7+8.777308091276461E-8i 1.1324403004133576E-7+4.983237406530117E-8i 9.646397169705483E-7-4.530476500609696E-7i 1.7645051143528494E-4 1.0127511460339972E-4 -5.824125567213947E-6 2.5705277062213064E-7+6.427538689293125E-8i 1.2530624208223322E-7+3.9762992731390154E-8i 9.670479352289438E-7-4.080607703968603E-7i 1.4758491649221838E-4 1.323201907854274E-4 -3.9301711360574275E-6 1.0855280389789016E-7+1.3555903701259804E-8i 3.4023981177661734E-7+1.2579908821707424E-7i 1.2168059480671868E-6-4.424474642332973E-7i 1.4857231524278907E-4 1.3079058024677696E-4 0 7.095740634966033E-8+3.25605358788077E-8i 3.424180386346904E-7+1.4138469529713235E-7i 1.168315853737473E-6-4.6112174633383757E-7i 1.5024140593753363E-4 1.2578018984204216E-4 0 8.568059532748243E-8+3.8887817514765555E-8i 3.0522897556059576E-7+1.2475226605280559E-7i 1.1392051621570068E-6-4.768522587810806E-7i 1.4483523353096432E-4 1.2528861534476297E-4 0 7.177733419935228E-8+3.4155239338134134E-8i 3.1210435741494924E-7+1.2773994619893293E-7i 1.198943714798692E-6-5.041175339137271E-7i 1.4276705445838016E-4 1.316017415139584E-4 0 5.551611909288337E-8+2.702835817296999E-8i 3.588491646659372E-7+1.4885739768419047E-7i 1.2375695778046306E-6-4.824315038023103E-7i 7.035852974157502E-5 1.4896314250974148E-4 0 -2.2086748454793378E-7-1.1107650929320645E-7i 4.1346606222703954E-8+1.98959709413656E-8i 2.8917056971340633E-6-6.4298523439938E-7i 6.982019168437496E-5 1.4817104179151174E-4 -1.160908744091383E-6 -1.0636265729280225E-7-9.163008653994491E-8i 6.143231762950001E-8+9.904022866003467E-9i 2.9297893966492156E-6-6.35330266034801E-7i 7.077958503343497E-5 1.5078357144973154E-4 0 -1.6531380706696262E-7-8.194032146552344E-8i 5.603254836109414E-8+2.969623229116615E-8i 2.794817975792437E-6-6.447344104115364E-7i 7.074034380298942E-5 1.510101065352142E-4 -2.5682775769781075E-6 -7.91169825226784E-9-6.414796215699001E-8i 1.1417762899338865E-7+1.5775522651939367E-8i 2.7747094389516695E-6-6.386945316868808E-7i 6.937844848241769E-5 1.503598541635767E-4 -1.5413678536581051E-6 -2.920092604177804E-8-6.173096851747051E-8i 7.057192589453772E-8+7.4166088820150815E-9i 2.8644286734101285E-6-6.319737658085078E-7i 7.118092952363671E-5 1.5265692662371286E-4 -1.2926165629518989E...
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This document was uploaded on 01/24/2014.

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