H_75nm_L1_65um_D_4um

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Unformatted text preview: 13337793503E-5-7.801099401407632E-6i -6.584814857001311E-5 1.2734587128837812E-4 -1.6070109357241632E-6 3.9792690621431985E-6-9.239681314361048E-7i 1.3336190082776936E-6-3.7059964596409103E-7i 3.067390619806904E-5-7.91902642155581E-6i -6.353511997098769E-5 1.2745386653936522E-4 0 -9.149801805360705E-8+2.0638740726542825E-8i 1.9175105497113633E-8-2.3743714759479187E-8i 2.723525218669827E-5-7.08144976556823E-6i -6.0378777239980245E-5 1.2779021620487485E-4 0 -6.026002367237604E-8+1.4082062962939013E-8i 2.8377015351150477E-8-2.4842560728552746E-8i 2.3342338796047966E-5-6.121569524406012E-6i -6.257330573023124E-5 1.2780901708380404E-4 -2.3041578032584177E-6 2.7194249411502377E-6-6.681596187476218E-7i 1.3938495922123397E-6-3.870155204564204E-7i 2.5111761421764348E-5-6.569685933984316E-6i -6.4814188494648E-5 1.2955123928963243E-4 -1.7404692371739257E-6 3.047867493930395E-6-7.153760296912319E-7i 1.2375262438926726E-6-3.4432041964953254E-7i 2.731131327481026E-5-7.072039909589156E-6i -6.514237672699433E-5 1.2517414351414588E-4 -2.8880471627886774E-6 5.66476932975541E-6-1.3628095168329268E-6i 2.190061855756274E-6-6.004185831555137E-7i 2.972415708028508E-5-7.754133929357361E-6i -6.385938536066082E-5 1.3064463762118493E-4 -4.0085734649066085E-6 4.706922990035384E-6-1.1398136154209237E-6i 2.4295422865044027E-6-6.586704260419412E-7i 2.385606092576562E-5-6.247965789695903E-6i -6.193532237050557E-5 1.4955124036198535E-4 -4.011196517879036E-6 1.5224436398214553E-6-3.6476325053725153E-7i 1.4958429111560832E-6-3.921263051411095E-7i 1.4262886566546008E-5-3.744496274822968E-6i -6.001367473823409E-5 1.5262120423227636E-4 -3.920831435471757E-6 1.064648443343384E-6-2.637940225182573E-7i 1.188015668274289E-6-3.1645557693788857E-7i 1.2753843917513892E-5-3.35707029720236E-6i 2.918808841195862E-5 1.750398794310469E-4 -1.786678486318782E-4 1.4381620680452636E-6-3.815380380267821E-7i 1.5223957589070767E-6-3.887188639565345E-7i -2.3717205449231626E-7+5.8752623334955744E-8i 3.0075401624817292E-5 2.0E-4 -1.479927659671297E-4 1.268132702250771E-6-3.375349749293262E-7i 1.5178399256465834E-6-3.888643524675903E-7i 2.7272716306735036E-7-7.151761721854274E-8i 2.5947402211968745E-5 1.8186319696637544E-4 -1.6122133967916698E-4 1.4810172112351513E-6-3.937716733350587E-7i 1.656188762823986E-6-4.235951833396658E-7i -1.586241994372459E-8+2.0994526141358084E-9i 4.548561227611517E-5 1.9999999999999998E-4 -1.2198982636603689E-4 1.2301128060340297E-6-3.275758637199777E-7i 1.3531430019157083E-6-3.445338896229148E-7i 6.842023710069393E-7-1.786476303097925E-7i 3.128901787782118E-5 1.75396584726659E-4 -1.4142407159543023E-4 1.6715520869178278E-6-4.446605860013608E-7i 1.7543935793820877E-6-4.4732878269819745E-7i 2.614698210789121E-7-7.074499832925724E-8i -5.84761468544072E-5 1.227464953895497E-4 0 -1.0311021461607492E-7+2.2405119827571124E-8i -5.761703808070812E-9-1.616010208461971E-8i 2.4126136592633924E-5-6.35569268387835E-6i -6.250086317111401E-5 1.2416101682828458E-4 -3.1401703664309846E-6 3.98014753986...
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This document was uploaded on 01/24/2014.

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