H_75nm_L1_65um_D_4um

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Unformatted text preview: 13331418798E-8i 4.1147620217947973E-4-9.60380519703577E-5i -4.120889433677901E-6 -2.8811852688671927E-6 -1.0727641647958202E-6 1.2857343242236516E-4-3.000631835027405E-5i 1.4558867484605002E-6-2.9532097008426114E-7i 4.200169833435809E-4-9.805344159664322E-5i -5.035928866830275E-6 -1.6615034378160995E-6 -1.1312400610528856E-6 1.8552100205624622E-4-4.329889423165823E-5i 4.632616662161093E-6-1.0522813564689003E-6i 5.24969243833855E-4-1.2253742736149717E-4i -4.698860179840471E-6 -2.296440533253966E-6 0 4.620692426500294E-6-1.166549283127866E-6i 3.505154841673181E-7-1.0631485808250533E-7i 5.296576854654488E-4-1.2359867148530965E-4i -4.5627526158382775E-6 -1.2202392057752694E-6 0 4.885918795535359E-6-1.2218144056066447E-6i 1.165203574775402E-6-2.741775326729294E-7i 5.032406638015599E-4-1.1748887014203923E-4i -3.7075241300292105E-6 -2.1990672317111757E-6 0 8.802600598708697E-7-2.9329919951019057E-7i -1.569752567741586E-6+3.5067449185186256E-7i 4.0523907878547744E-4-9.463841788083594E-5i -4.352976510357413E-6 -2.882827509212714E-6 0 5.264516154623866E-6-1.3179829103966107E-6i 6.376458215487776E-7-1.7920781871952736E-7i 4.8095904116732E-4-1.1222356387337509E-4i -2.991605074153283E-6 6.966303776021496E-6 0 -4.866059384497911E-6+7.90375946180255E-7i 1.628026347113773E-6-3.624010190425575E-7i 3.142905658678661E-4-7.315926288211665E-5i -3.0439615186121752E-6 6.161890918064158E-6 -6.49031318196808E-7 6.521457175679129E-5-1.5155770075320554E-5i 6.54920670254967E-6-1.564940772910109E-6i 3.1986144171635734E-4-7.45008881107758E-5i 2.9774705941651533E-6 6.936217144444382E-6 0 9.184765799423918E-8-1.627593864891863E-7i 1.3419360737435918E-7-3.520071960768275E-8i 1.1168333004365199E-4-2.6157507019880985E-5i 2.757604580401883E-6 8.212391603112061E-6 0 4.174539855342615E-7-2.273942036161436E-7i 2.32444780730659E-7-5.204929124458643E-8i 1.0972651558625014E-4-2.5725819273345513E-5i 2.5683829450561233E-6 7.427298848582102E-6 -1.0265551888553831E-6 1.5227745923377512E-5-3.7278111841168868E-6i 4.308993963434581E-6-1.0003551610722242E-6i 1.144196925800476E-4-2.689552170178518E-5i 3.5012417222506264E-6 9.279785487117582E-6 -9.619523345233587E-7 1.0858945399683933E-5-2.744284207097103E-6i 3.5527806477357594E-6-7.592340097589689E-7i 9.666364013069667E-5-2.279623692539759E-5i 3.039385437951449E-6 9.32362094967657E-6 0 -1.8197155358945505E-8-1.3903890100724368E-7i 2.3083366092318184E-7-3.902823789121392E-8i 1.0145695813057068E-4-2.3804918517111923E-5i 2.4757135669546076E-6 8.766221732493383E-6 -1.2607431049955493E-6 1.69620803909326E-5-4.106886529725413E-6i 5.824710723609332E-6-1.3334429901912009E-6i 1.0942779634128666E-4-2.575256537845369E-5i 3.7560453269367422E-6 1.0137178127653411E-5 -5.595134741315458E-7 6.145407278334343E-6-1.6189776868446096E-6i 1.6125068719021981E-6-2.5533891061684833E-7i 9.12748626398091E-5-2.152119889009263E-5i 1.6047605250433394E-6 9.305378760564748E-6 0 3.5428680711039003E-7-1.8349795664699317E-7i 2.2536435743871625E-7-5.147108296463717E-8i 1.2054758144313524E-4-2.83273944505364...
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This document was uploaded on 01/24/2014.

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