H_75nm_L1_65um_D_4um

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Unformatted text preview: 91E-6-3.838133140096935E-7i 1.3386412236634045E-4 1.4323572580170565E-6 0 3.885270029353108E-9-8.047239380153945E-10i 1.8779569411002677E-9+1.7712370008610812E-9i 2.897829038104061E-6-3.881795650428016E-7i 1.3274512183132091E-4 1.4807053163239766E-6 -1.3309229418685348E-6 4.536042405196466E-8-1.0162739945466609E-8i -3.254990573212804E-8-1.5271709423112713E-8i 2.9182390178114997E-6-4.029853522869951E-7i 1.3185447926729056E-4 -3.1777765488184807E-6 0 3.3563338705522305E-9-1.073595918613915E-9i -2.3872625273658565E-8-1.549431648969709E-8i 3.029057178014806E-6-3.7075062905841675E-7i 1.314737822928697E-4 1.1224543104274606E-6 0 3.248187030273613E-9-1.1174013206957743E-9i -4.535320821793548E-9-1.4065731279454409E-9i 2.9693669530445274E-6-4.0671941008754187E-7i 1.3219207576148744E-4 -1.635895899354457E-7 -2.350879038635324E-6 7.90566142784504E-8-1.7241533335737265E-8i 4.4662244216538485E-9+3.1142545783583193E-9i 2.8930048412612925E-6-4.2677625945066864E-7i 1.305483887913463E-4 -1.0846472279564968E-6 0 3.2827518563241823E-9-1.1232313540987028E-9i -2.8579405780782264E-9-2.0428102744067121E-10i 3.000068081314988E-6-4.129861383100417E-7i 1.3044123832987465E-4 -2.6505418606441365E-6 -2.2337549962452473E-6 7.737704670414356E-8-1.6826131983060248E-8i 9.784398782551888E-8+4.947776290635771E-8i 2.9829797349267303E-6-4.244005024664329E-7i 2.4852006732226144E-4 -3.493517991077935E-5 0 1.4217431586461925E-9-2.2649661793367813E-9i -2.6934044488991497E-10+3.719179204517663E-11i 7.780047512417433E-7-1.595964290307461E-7i 2.4873443053985086E-4 -3.850189941247533E-5 -1.1266468335102169E-5 8.497796387455117E-8-9.058111122061843E-9i -5.621824188771536E-9+1.6631970447225464E-9i 7.669208202926648E-7-1.6077335614577072E-7i 2.4515231244598494E-4 -2.8862119682108207E-5 -5.918631360823393E-6 4.911849201329833E-8-4.930636568212982E-9i -1.95126397993418E-9+7.174341034356187E-10i 8.032220490581703E-7-1.6287686893915205E-7i 2.554270846448802E-4 -4.413515442730178E-5 0 1.3978433145147781E-9-2.0869940600613408E-9i -2.806618554806264E-10+1.1633295113921539E-10i 7.246661341055347E-7-1.5391691848902082E-7i 2.559663919314521E-4 -4.976156570481259E-5 -1.0056208094095242E-5 6.692864914291248E-8-9.281782021849346E-9i -6.823207427603589E-9+1.6095086281897124E-9i 7.12665826805981E-7-1.5343269705678518E-7i 2.5301620568192424E-4 -3.3188398339157044E-5 -5.136721015730929E-6 3.733511935824517E-8-5.563109878211425E-9i -2.2611725444599342E-9+6.260457644393023E-10i 7.449142656074707E-7-1.571776602125424E-7i 2.489090789803991E-4 -1.5665491883435425E-5 0 2.267987009210394E-9-2.0352865536095052E-9i -2.111129959270295E-10+4.06397841043272E-11i 7.800731526663288E-7-1.6115041905551424E-7i 2.4691042472718276E-4 -1.9157963514401314E-5 -8.145032901448705E-6 6.361227392757921E-8-6.7100361981144345E-9i -1.6203069074198672E-9+5.785681377925829E-10i 7.903124367420858E-7-1.6322757774304815E-7i 2.427891192734404E-4 -2.0303847707373317E-5 0 2.0020547941734407E-9-2.324858627030796E-9i -2.53479280892243E-10-8.338269791272256E-12i 8.275621...
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This document was uploaded on 01/24/2014.

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