H_75nm_L1_65um_D_4um

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Unformatted text preview: 37E-10-8.358258648089174E-11i 5.826755645072903E-7-1.3415319912455967E-7i 2.8315248063656435E-4 -9.47589498853638E-6 0 1.2012710167627996E-9-1.5285394828851701E-9i -1.2065258602975503E-10+3.8539809623116974E-11i 5.826475715035062E-7-1.338490536930039E-7i 2.705279130399583E-4 -1.8675282750232007E-5 0 1.864437596206277E-9-1.7164621435506735E-9i -1.451104286539251E-10+5.4989939291726484E-11i 6.442876070661415E-7-1.4419031558413444E-7i 2.660805942424975E-4 -2.8549638959071363E-5 0 1.1078034883300707E-9-1.8075261815492336E-9i -2.312847933610847E-10+5.753867030173876E-11i 6.664030858824267E-7-1.4723174943066834E-7i 2.7325742499092196E-4 -3.056728166840044E-5 -9.600781650001204E-6 5.0928347456997707E-8-9.674670678082597E-9i -3.3286700136830333E-9+8.18879302764767E-10i 6.242283563435306E-7-1.4107966038565212E-7i 3.0000000000000003E-4 -7.185753145412581E-5 -2.5467106654166254E-5 9.104465456255837E-8-1.9380598662091682E-8i -1.484619568215844E-8+3.1435499026980513E-9i 4.818798087873571E-7-1.1486587814666558E-7i 2.787656340529029E-4 -6.126929998340224E-5 -2.602607207871623E-5 1.1894481579251473E-7-2.2684454196378182E-8i -1.7015035174543595E-8+3.5355389462636314E-9i 5.681144167482297E-7-1.3271637609273814E-7i 2.793530386813989E-4 -7.946593606756497E-5 -2.0545610772510646E-5 9.057687783696756E-8-1.73838459941447E-8i -1.7185597963847588E-8+3.389854246753629E-9i 5.588761203149262E-7-1.2991954247720893E-7i 2.999999999999999E-4 -5.0104854340779755E-5 -1.836051127015974E-5 6.781769625998997E-8-1.4647978415373552E-8i -7.855052907561941E-9+1.7246850226697568E-9i 4.967305446389768E-7-1.1751735028499783E-7i 2.76430349924817E-4 -4.8780512834067744E-5 -3.595359172423633E-5 1.6841769186149335E-7-3.225317790900528E-8i -1.9036722975915053E-8+4.112289282187836E-9i 5.726898381523602E-7-1.3562910307090283E-7i 2.8083412279746993E-4 -4.129272945669597E-5 -1.4868857733047776E-5 6.99385979860531E-8-1.3623684985125707E-8i -6.490235132319908E-9+1.45118537554915E-9i 5.80155012984776E-7-1.3370051582647408E-7i 2.8153770566771583E-4 -5.9105739483840025E-5 -1.174945677044647E-5 5.4225563066758996E-8-1.0824819541046846E-8i -7.285161049436801E-9+1.5914741824258913E-9i 5.694648476687216E-7-1.3130228757358626E-7i 2.999999999999999E-4 -8.602168782819202E-5 0 -1.2840288916610295E-9-1.0959377857892364E-9i 6.645050372797637E-10+1.1179317025628076E-10i 4.825601215772563E-7-1.142374568740347E-7i 2.745156475468642E-4 -1.0103742084663208E-4 -1.751341308255436E-5 7.737779932464557E-8-1.4772554874411189E-8i -1.935606636271908E-8+3.576733758415859E-9i 5.616668248736804E-7-1.3015452088669023E-7i 3.0000000000000003E-4 -1.132889341406473E-4 0 -1.9045525996483E-9-9.762153358309455E-10i 6.520013646702378E-10+2.0876677001843225E-10i 4.6109565507269335E-7-1.1011167161713433E-7i 2.8300646732024796E-4 -7.129237069294797E-5 0 7.525486891574378E-10-1.5669950433424266E-9i -1.4176305942706482E-10+1.7652644865794437E-10i 5.583331135352108E-7-1.2874824987797992E-7i 2.6927547584803017E-4 -6.846569459898952E-5 -1.41178629662...
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This document was uploaded on 01/24/2014.

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