H_75nm_L1_65um_D_4um

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Unformatted text preview: 24261134217E-6 7.680438596415022E-4-1.791148331954251E-4i 1.1512432931377634E-4-2.669811512626467E-5i 8.805556381151427E-4-2.0544767680293283E-4i 8.399948059498957E-6 2.0143468947575507E-6 -1.7382049426037834E-6 1.1001049070490813E-5-2.8785110247164817E-6i 7.325929073989325E-7-2.775959490571433E-7i 6.808343214834176E-5-1.6097318068393233E-5i 9.258476646354154E-6 2.3788529794596547E-6 -2.1324157714843705E-6 1.1629262261859858E-5-3.0026868169524823E-6i 8.375059285345669E-7-2.872674766416234E-7i 6.257366235632393E-5-1.496300223788209E-5i 4.335452296953873E-6 4.4732213379840655E-6 -9.778816355690727E-7 1.1897657367312682E-5-2.9579076584163554E-6i 2.2935638712959756E-6-6.651089636897095E-7i 1.007281720267364E-4-2.368940610671089E-5i 5.064834714647081E-6 4.567565622266825E-6 -1.2530327523818225E-6 1.3051923377145547E-5-3.2552620664860515E-6i 2.475530356811366E-6-7.432951986839377E-7i 9.253021711275938E-5-2.1810345525180895E-5i 3.4046496072074143E-6 4.5135619443172345E-6 -1.2445992125697696E-6 1.761999260781242E-5-4.2669423640625505E-6i 2.9844264316667E-6-7.557874728736876E-7i 1.1148094086186404E-4-2.6212320929995E-5i 4.693327763068485E-6 5.106943871980917E-6 -1.4130878617558024E-6 1.5388297375320856E-5-3.823963675714855E-6i 3.042337144961552E-6-8.446037445730666E-7i 9.518869011247152E-5-2.2494566780827927E-5i 3.943375073155919E-6 4.979804115815136E-6 -1.4933399452358505E-6 1.866463500637277E-5-4.550302081487562E-6i 3.5303824809803675E-6-9.043660974272355E-7i 1.0325141628176518E-4-2.4331123937415118E-5i 3.6448735568997877E-6 3.985466773548641E-6 -1.5236941623439256E-6 2.0689795705024783E-5-4.968141928976859E-6i 3.0610670803257365E-6-7.695630287295954E-7i 1.0855839695351142E-4-2.553148568229997E-5i 5.629891583632899E-6 5.108581677607392E-6 -1.4637377454702067E-6 1.3375674981829542E-5-3.3757884098165047E-6i 2.610302543892862E-6-7.917325221398036E-7i 8.624664495176547E-5-2.0455567604317534E-5i 6.305425973971488E-6 4.7226487245138225E-6 -1.5911896559280444E-6 1.3111113879734314E-5-3.317777126199406E-6i 2.27607559919943E-6-7.169650543595025E-7i 8.087326926454162E-5-1.9190292397347312E-5i 1.2360574303000565E-5 4.623119568042265E-6 -1.2577588087469455E-6 4.425166056455183E-6-9.982149254425718E-7i 6.097878901624018E-7-1.2817067913970746E-7i 4.873513546500405E-5-1.1960916370017093E-5i 1.253857163893787E-5 7.385071437040956E-6 -1.1037019783899154E-6 3.6558003946498413E-6-8.360452326029721E-7i 9.527135879800382E-7+5.811020158350925E-8i 4.668241541003045E-5-1.1507390987810714E-5i 5.57650686357568E-5 7.9190807684583E-6 -2.387259358550704E-6 5.075175146220806E-7-1.4213122566846327E-7i 2.0055246107535842E-7+1.4728136039279834E-7i 8.937014967178763E-6-2.1819339013031297E-6i 5.9775569405574445E-5 1.04664145282108E-5 -3.0529415982415555E-6 5.40584717323819E-7-1.6346982537803848E-7i 1.2254999905699589E-7+8.114579936580025E-8i 8.179454137813137E-6-1.886181713311776E-6i 5.678536114069529E-5 1.0288557953088674E-5 -2.479433275176408E-6 4.999372509503311E-7-1.4370784759255697E-7i 1.2851889490...
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This document was uploaded on 01/24/2014.

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