H_75nm_L1_65um_D_4um

2499914911228676e 83208205654985758e 9i

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Unformatted text preview: 51677241E-9i 2.4855750516344086E-4 -5.875206797494007E-4 3.9056704609289293E-4 -5.2808099409677504E-8+1.3925089848035033E-8i 8.069390486138971E-8-2.0709124339495335E-8i 2.175321727611788E-8-5.857195393006981E-9i 3.028222419102675E-4 -5.899997773644598E-4 3.4598114473815926E-4 -5.0963179621102544E-8+1.3374880747130418E-8i 6.830567715519945E-8-1.7475243741234152E-8i 3.2813305751395865E-8-8.721090930864807E-9i 2.5979002692817673E-4 -4.927985973421597E-4 3.246839797728422E-4 -8.495694351018243E-8+2.2269364333331753E-8i 1.053948460150339E-7-2.6913581546811364E-8i 3.949028146493587E-8-1.0576431262966894E-8i 1.8644246348299096E-4 -6.555336992498062E-4 3.0825115889199537E-4 -3.834439322599105E-8+1.0183248698411414E-8i 7.679210932085303E-8-1.975263568113975E-8i 4.3149034664114755E-8-1.1348195857174284E-8i 1.3816232423423464E-4 -6.184040963790741E-4 2.6554130721237115E-4 -4.403882088534137E-8+1.1737679620545606E-8i 9.748748699668155E-8-2.5095139248495765E-8i 6.172431158638513E-8-1.618356954728878E-8i 2.3691601211608764E-4 -5.641312413467169E-4 2.3938189560583796E-4 -5.725883723601303E-8+1.5069426546222455E-8i 8.684637712493792E-8-2.219244971700694E-8i 7.022936492160494E-8-1.8426674081960134E-8i 2.1034923898598668E-4 -5.869271726615644E-4 3.148365543386161E-4 -5.498408920781335E-8+1.4527348066820303E-8i 9.23063696800446E-8-2.3688190523931774E-8i 4.338480385147392E-8-1.1464412877897369E-8i 2.455427064963124E-4 -6.237250732744902E-4 3.3193344552063077E-4 -4.579168081181827E-8+1.2083239498611452E-8i 7.416244874118477E-8-1.902615645918929E-8i 3.727238416761395E-8-9.852075670910383E-9i 6.39459886601445E-5 -5.978058375606054E-4 4.4502032662872756E-4 -3.8867780752707785E-8+1.0475327172300156E-8i 1.1488382231064663E-7-2.9710141314551606E-8i -8.887222173543978E-10+1.0664856398412273E-10i 6.39477303224257E-5 -5.513876119378596E-4 5.013844724241811E-4 -4.3881834770263534E-8+1.1805236161199741E-8i 1.1864958094507667E-7-3.0676845658475946E-8i -2.3674265069742588E-8+6.004821999683576E-9i 1.275403787326614E-4 -5.680117859833195E-4 4.69680809461882E-4 -5.0092037770921695E-8+1.3360229806853455E-8i 1.0708945494999449E-7-2.7630951042905625E-8i -7.767565772861457E-9+1.8363715678816747E-9i 8.022280881290522E-5 -5.279925217251895E-4 4.5437588391032994E-4 -5.710802248790049E-8+1.5293894417707628E-8i 1.3695411424849687E-7-3.537444042766534E-8i -1.8585007533464503E-8+4.641825757347445E-9i 1.2794993870554283E-4 -5.185945978420396E-4 5.236338952687277E-4 -5.56947402502738E-8+1.4835411377630815E-8i 1.0847840185834317E-7-2.798240791235E-8i -2.9290300458159958E-8+7.393397268427073E-9i 1.9035727039311946E-4 -5.332508454305771E-4 4.887858891744479E-4 -5.988681738852126E-8+1.5852345044016298E-8i 9.663547153634889E-8-2.4867899093728185E-8i -1.1144128992336127E-8+2.651071728636267E-9i 0 -5.782156677186569E-4 4.745214866544541E-4 -3.0288326665655934E-8+8.293571092755016E-9i 1.275502207578061E-7-3.305160660432495E-8i -1.6355474262735643E-8+4.1708810912717894E-9i 6.509172953554193E-5 -4.989498...
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