H_75nm_L1_65um_D_4um

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Unformatted text preview: 266E-6i 2.7473972155356297E-6-5.851571065473848E-7i 5.714748347604784E-5-1.4355915668300481E-5i -6.824563116757939E-5 1.1866253090425842E-4 2.668889561042311E-7 -6.410515007673756E-6+1.39750396260796E-6i -3.649872807714079E-7+7.578053935290245E-8i 5.415271934424334E-5-1.3602288032377174E-5i -7.079559409971478E-5 1.1323375217433279E-4 7.500000000000002E-8 -4.445417007600122E-5+1.0201939939273597E-5i -2.3140574181845786E-6+5.73539811643542E-7i 4.827634126956835E-5-1.3405029793701095E-5i -6.899999999999997E-5 1.1407164787579448E-4 7.5E-8 -1.3052759444093417E-5+2.724983902562395E-6i -4.773197552035367E-7+8.460029200044646E-8i 7.938529818308768E-5-1.9589226165930735E-5i -7.030347172094038E-5 1.1487648570383326E-4 7.500000000000001E-8 -4.1898120290221764E-5+9.401813014334578E-6i -1.6477424326049356E-6+3.957535596692858E-7i 5.1561986972678705E-5-1.3959493723369052E-5i -7.002226514351523E-5 1.131325599299544E-4 1.329053578881073E-6 -3.2265251901133704E-5+7.48535071925507E-6i -3.2421754243800805E-6+8.284889622336847E-7i 5.260345598008661E-5-1.394345441666292E-5i -8.506220766830076E-5 1.5582607331201048E-4 2.1819261623034104E-7 -2.4977756675679886E-7+6.226364623884706E-8i -2.875278943663208E-6+5.075862034972392E-7i 2.734534244042725E-5-6.55362244325608E-6i -8.610209498119446E-5 1.5499999999999995E-4 0 2.9721634452195556E-8+7.481190562874662E-9i -1.052571282798703E-6+2.4498248328447863E-7i 3.5076694979008574E-5-8.013406727406386E-6i -8.607533041991726E-5 1.5499999999999995E-4 7.500000000000001E-8 -6.984653144054276E-8+3.48497418006799E-8i -2.1386088886398154E-6+1.9200314255839711E-7i 3.5960926278425836E-5-8.266562441714286E-6i -8.624625867244212E-5 1.5613405610193648E-4 1.0916069204743753E-7 7.813888882601817E-8+7.140041491382476E-9i -1.3494373685585259E-6+2.7024272921671864E-7i 2.6302765240950044E-5-6.4174148323215E-6i -8.780853395392872E-5 1.5499999999999995E-4 7.5E-8 1.3564248104169786E-7+2.160182666077759E-9i -5.456926307903293E-6+8.853848896012689E-7i 3.613027166012484E-5-8.43479058777529E-6i -8.613917076547558E-5 1.5595173319808478E-4 3.886171811056899E-7 -3.143813902872772E-7+9.108563518156477E-8i -2.2352177396434137E-6+4.056420263132132E-7i 2.6858226704881694E-5-6.5282255184873074E-6i -8.261919023044286E-5 1.5499999999999997E-4 7.500000000000004E-8 -1.728057582144523E-7+5.136192077551116E-8i -3.433741014420602E-6+3.690074931492132E-7i 3.1726657600910345E-5-7.253876327146841E-6i -6.855144289611058E-5 1.569625113344506E-4 0 1.3421574977801054E-8+5.527038510200199E-9i 1.6104357276197633E-8-1.696933574699133E-8i 1.4099968613804952E-5-3.654886951776492E-6i -6.896219261752456E-5 1.5387051393783816E-4 1.5962613063652977E-6 -1.1702061700398376E-6+2.130662875084808E-7i -1.1903736925611419E-6+2.2387151526142618E-7i 1.582767751417464E-5-4.075706039673545E-6i -7.012538989417503E-5 1.5399293359613463E-4 7.500000000000001E-8 -1.1046703912597088E-6+1.1424317107137465E-7i -1.2964006502130193E-6+1.0462114848526956E-7i 1.6920372620388325E-5-4.388670108048277E-6i -7.04182...
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This document was uploaded on 01/24/2014.

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