H_75nm_L1_65um_D_4um

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Unformatted text preview: 1.7575023928046005E-4 0 7.159585480032149E-9+4.3063260023873395E-9i 2.3220033499377842E-8-1.7357643763309264E-8i 9.871692672960769E-6-2.6357543330589426E-6i -2.0342398375777445E-4 -1.6988972017874552E-4 -5.194056521311638E-6 -7.83942958132155E-7+2.177277392030839E-7i -1.8103988706956438E-6+4.5744855918560326E-7i 1.16238938082893E-5-3.102570393681173E-6i -2.1856187049080442E-4 -1.24911762758805E-4 -1.5947797273495553E-6 -1.7017352372365227E-5+3.786553815155732E-6i -2.3714842418972323E-6+6.28359189394043E-7i 3.813807854299298E-5-9.963105230937788E-6i -2.209110269258291E-4 -1.3123055567353288E-4 -1.2650021967550224E-6 -4.204320122855147E-6+9.047470176538203E-7i -1.0744848115117518E-6+2.7465410395999257E-7i 3.007520442131183E-5-7.677797076881843E-6i -2.227308077076678E-4 -1.3280526171529923E-4 0 8.812342052374096E-8-3.8423050803537695E-8i -8.139199608273954E-9-1.3722456282394546E-8i 2.5468841589320715E-5-6.563899726233598E-6i -2.2071010316707375E-4 -1.287178592604197E-4 0 1.6117248917424387E-7-5.812894350847725E-8i 8.370007002304429E-11-1.4010960933119598E-8i 3.411301790291939E-5-8.65272652983349E-6i -2.2195130790537263E-4 -1.303857674463712E-4 0 -5.898649680111509E-8-1.0675082258636083E-8i -5.93302415431112E-9-1.2739460216896044E-8i 2.881037597314682E-5-7.395181560532827E-6i -2.1967182162877503E-4 -1.288048836239307E-4 -1.8580714107874161E-6 -9.735810331586853E-6+2.140399460995957E-6i -1.9893656811538685E-6+5.21723831880697E-7i 3.299686516306412E-5-8.513231958423375E-6i -2.2133636335693496E-4 -1.2953226471683918E-4 -2.1523231395566234E-6 -5.805275619683401E-6+1.3127504281643766E-6i -1.757236116938109E-6+4.5852966597105373E-7i 2.883491382000535E-5-7.470726493177892E-6i -2.2156126351031456E-4 -1.2761411235384464E-4 -1.3984405804863105E-6 -4.145506018244163E-6+9.35021722119414E-7i -1.1453561476543888E-6+2.964521185972249E-7i 3.122183574605225E-5-8.051003974842223E-6i -2.2277909819409802E-4 -1.1979814821148378E-4 0 3.9027115438121905E-7-1.0734990239577794E-7i 5.2475346507199546E-8-2.8927220369068252E-8i 3.4886733234699544E-5-9.109735558124733E-6i -2.2128688829099288E-4 -1.246549124851015E-4 -1.7560725951949692E-6 -6.025168006404459E-6+1.388517132695143E-6i -1.6027027692564042E-6+4.1855014662432956E-7i 3.362649908921024E-5-8.716300669190526E-6i -2.221759847218091E-4 -1.2533745320638426E-4 0 -1.2044231397408586E-7+5.895528551458362E-9i -3.3112232438019716E-8-6.934229914804894E-9i 3.2161487481457584E-5-8.317589618576789E-6i -2.2298979130015918E-4 -1.2304999109847054E-4 0 2.0686144661802297E-7-6.600133718422455E-8i 2.423030904704166E-8-2.1338503425309917E-8i 3.189201487783296E-5-8.308177737352968E-6i -2.2329106427777107E-4 -1.2801560997297804E-4 0 3.1255038170032636E-8-2.4851168154832887E-8i -2.546762291440079E-9-1.4465132597605802E-8i 2.7556358344735858E-5-7.1633549206424896E-6i -2.198134616823625E-4 -1.2650003268869502E-4 -2.561611749291416E-6 -1.1099114294630182E-5+2.5299002652534646E-6i -2.613131683291895E-6+6.947477097953609E-7i 3.242390238504651E-5-8.4773...
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This document was uploaded on 01/24/2014.

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