H_75nm_L1_65um_D_4um

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Unformatted text preview: 54928441956E-7i 1.3521617358035464E-4 2.609156592916141E-7 -2.1594870449356384E-6 7.013523094540075E-8-1.4546531743399843E-8i -8.008137089392086E-9-2.9613986731709057E-9i 2.805085305114277E-6-4.033930743811205E-7i 2.353886535867786E-4 -2.1528635766885604E-5 0 1.1051274243804852E-9-3.3322980778651294E-9i -3.7947896054123775E-10-1.7120072862369193E-11i 8.946584654910971E-7-1.63483584202251E-7i 2.3126664911108684E-4 -2.5843367756710575E-5 -4.818499970792975E-6 5.927041106383713E-8+3.2889246429292983E-9i 5.13658960283118E-10+4.331151304000828E-10i 9.345954470872513E-7-1.6237432857707033E-7i 2.453667034318166E-4 -9.561729899393637E-6 0 2.0922953260590816E-9-2.146476836010297E-9i -1.4509589557584689E-10+2.9177234015717125E-11i 8.077144284624714E-7-1.6317147761996198E-7i 2.4227097693874152E-4 -1.3261135286700225E-5 0 1.7485643932626143E-9-2.4496265351366324E-9i -1.5592776418329622E-10+4.894919179663777E-11i 8.326962469695666E-7-1.6398261267999367E-7i 2.3958708608026123E-4 -8.920406793621111E-6 -5.79867899281907E-6 5.2575249628472046E-8-2.4791275490503796E-9i -3.6958601209438944E-10-1.886087249244493E-11i 8.522138344961359E-7-1.6605313781576312E-7i 2.4477512746725564E-4 -1.5408316366346652E-5 -3.925715552891492E-6 3.298787557510778E-8-3.911235869309351E-9i -6.294861397498312E-10+2.096404509284943E-10i 8.106568705019919E-7-1.6356061491782076E-7i 2.348067099434353E-4 -1.0945681941864656E-5 0 2.122997653111359E-9-2.7610147664941216E-9i -1.9507805443651108E-10-3.516122944018096E-11i 9.00497115098239E-7-1.6235361927965944E-7i 2.3766102468675767E-4 -1.2846020056555082E-5 0 2.457321742843719E-9-2.354966035605385E-9i -1.4121814620780582E-10+2.2797157068211406E-11i 8.734052729353972E-7-1.6382673344815347E-7i 2.4018262061030053E-4 -1.4337186021901745E-5 -7.732418898331487E-6 6.881131502561839E-8-3.533597424415247E-9i -7.047174989800688E-10+2.4175489463960083E-10i 8.4460931478214E-7-1.668616180212545E-7i 2.3381265292546453E-4 -1.576932174883011E-5 0 2.306861316850256E-9-2.7454858062088265E-9i -5.049735085328728E-11+8.771251342332111E-11i 9.109410096159431E-7-1.6198346559432593E-7i 2.359978672107645E-4 -1.935953109527301E-5 -3.7944522445671388E-6 3.922039485770343E-8-1.1902248905777024E-9i -8.856629801573118E-11+1.7878744078447933E-10i 8.866120511623284E-7-1.6467947057069694E-7i 2.3820952890354075E-4 -1.6404690671206724E-5 0 2.1880595555898164E-9-2.463086810881425E-9i -1.4519085704121362E-10+6.559667574452993E-12i 8.679953764125082E-7-1.641548768469847E-7i 2.2918348533155047E-4 -3.888180053687772E-5 0 8.315470444923527E-10-4.2731261522984646E-9i -2.2922713757238922E-10+7.123671242179322E-11i 9.709711765596376E-7-1.5235433455689733E-7i 2.2987158219648743E-4 -4.174777894709331E-5 -3.520715009682625E-6 5.184370320972001E-8+3.990453107228994E-9i -8.528144013084439E-10+9.203860901370111E-10i 9.550136322897914E-7-1.5571348244489631E-7i 2.279332547156207E-4 -4.402092190287449E-5 0 3.0177027630318654E-9-3.3499681436511423E-9i -4.49989552504847E-10-1.1488595902517037E-10i 9.9076991...
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This document was uploaded on 01/24/2014.

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