H_75nm_L1_65um_D_4um

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Unformatted text preview: 04640293525625E-9i 1.6492509872700905E-7+7.64751169687767E-8i 1.9325062875437513E-6-2.314304183500102E-7i 1.734216273301807E-4 6.125997799340371E-6 7.500000000000001E-8 -1.632843126421947E-8-8.143126350929788E-9i 4.990097903787053E-7+2.0303881723424584E-7i 1.966519608911859E-6-2.4660570938173335E-7i 1.7160617251656842E-4 4.091967568074859E-6 1.1306124273409794E-6 -2.2626426481635087E-8+2.1326520371299516E-10i 1.0694461725547331E-7+5.343817153309946E-8i 1.9953888482471496E-6-2.2728869602177584E-7i 1.709617007632324E-4 1.1658736365667826E-6 0 2.1889569291891277E-9-6.009763261938559E-10i -4.707861160009358E-9-1.2041266936454673E-9i 1.921657102932733E-6-2.6344621469296493E-7i 1.7085402503775717E-4 4.999999999999998E-6 7.5E-8 9.330545214970725E-10-1.1580189463957373E-9i 6.633384188648993E-8+1.0288891540046982E-7i 2.296279307911078E-6-1.1096940162140806E-7i 1.7258559493485033E-4 4.999999999999999E-6 7.500000000000001E-8 -7.220307142483419E-9-2.395555952997448E-9i 1.0679731528169037E-7+1.0595907439929735E-7i 2.2312036939213843E-6-1.1564570056422253E-7i 1.6915398131362222E-4 8.02178155659464E-6 7.5E-8 -1.9531263928705706E-8-1.1688208499254745E-8i 4.946402082906792E-7+2.0001193625237803E-7i 1.8406825525514666E-6-3.3529819557886873E-7i 1.681837649250155E-4 6.742602690365087E-6 7.5E-8 -1.4706759856388955E-8-8.294497142458485E-9i 5.468491929294062E-7+2.2363469619352452E-7i 1.949052951442324E-6-3.0000333193363E-7i 1.7014735632586773E-4 6.716127813628843E-6 7.500000000000001E-8 -7.0098974426979415E-9-6.048333915531652E-9i 5.190575250980676E-7+2.1165093067540902E-7i 1.9275814275314645E-6-2.8985590473579046E-7i 1.6868118059795364E-4 5.621171810313104E-6 1.0011821653732872E-6 -2.486791087225112E-8-2.0300746443326453E-9i 3.264926377163178E-7+1.4752672953506705E-7i 2.096094133171837E-6-2.3147251845169543E-7i 1.6941174359503787E-4 4.252566199417483E-6 2.1755647946538522E-6 -5.1646257516207895E-8-2.1506797529787747E-10i 1.5616134070302489E-7+6.906435552605773E-8i 1.9637053887090432E-6-2.674613427713998E-7i 1.6717785242439983E-4 4.63851695939447E-6 1.6129619098387808E-6 -3.8822331147402055E-8-9.582007109871178E-10i 1.7931203930055685E-7+8.48403628629108E-8i 2.078538505865313E-6-2.4226179746322486E-7i 1.6652075947526441E-4 6.802367062504829E-6 7.500000000000001E-8 -9.955358107137285E-9-6.735456064957785E-9i 5.623777069352248E-7+2.3260992108211452E-7i 2.029574467253713E-6-2.89587955754549E-7i 1.6483595483160035E-4 5.230682753367444E-6 1.3927350565073496E-6 -3.379269795035128E-8-4.278514196646773E-10i 2.5572633665685036E-7+1.200584551329909E-7i 2.164517235567599E-6-2.370170256492314E-7i 1.6487862144163988E-4 6.674909180873529E-6 7.500000000000001E-8 -1.2734015381390962E-8-7.918629897640546E-9i 5.558447627433428E-7+2.3093818222554208E-7i 2.051271474151361E-6-2.959852127496138E-7i 1.5952696760637448E-4 -3.7208213654142935E-6 0 8.194405079677611E-10+6.608479904379192E-10i 1.6121090320868126E-8+1.17839985778926E-8i 2.3025201704633788E-6-2.2679643015418653E-7i 1.57714945020571...
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This document was uploaded on 01/24/2014.

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