H_75nm_L1_65um_D_4um

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Unformatted text preview: 3E-5 1.0434777317086278E-7-2.2645062643661586E-8i 3.864044011955943E-8-7.470027082528689E-9i 4.813582137373511E-7-1.1630770286990197E-7i 2.3418506050138928E-4 1.6098449953730592E-4 0 1.6884902603624403E-9-2.9070647885149884E-9i 7.441572556423548E-10-1.8660944568487617E-9i 6.614829864208851E-7-1.4788043690292012E-7i 2.30990642901083E-4 1.5790187561646974E-4 -7.190265551622002E-6 4.384293009378483E-8-7.614936677662982E-9i 2.2808801644759013E-8-2.2621652933225944E-9i 6.847987426283734E-7-1.504204915913276E-7i 2.304056965767925E-4 1.6669725929797504E-4 -8.699866508285779E-6 4.7021782208256185E-8-9.295001674669596E-9i 2.56647697302318E-8-3.3633674351883957E-9i 6.619845267565011E-7-1.5003681555571216E-7i 2.367876896125461E-4 1.5554081466951505E-4 -6.0702844348807154E-6 3.483601339377203E-8-6.942339761326244E-9i 1.686785099841517E-8-2.3081569934229135E-9i 6.598663201026035E-7-1.4679902076269532E-7i 2.2688999816603366E-4 1.5853082750286052E-4 -5.845548858819619E-6 3.874842620648234E-8-6.697460381340642E-9i 2.1392274085770945E-8-2.0101432575839397E-9i 7.079025896204619E-7-1.5265547910851006E-7i 2.3524184189731566E-4 1.516906258476747E-4 0 2.0051053836382315E-9-3.43184012978337E-9i 7.882420204189712E-10-1.4889048831419874E-9i 6.81376059665475E-7-1.4802264040915902E-7i 1.9489851513483186E-4 1.6547900869861708E-4 0 2.139315104995635E-9-1.7140988241965381E-9i 2.537916906970929E-9-4.335619731526402E-9i 9.081898512000536E-7-1.7535651474682165E-7i 1.8969294772215297E-4 1.6665298062505974E-4 0 1.8465974385840343E-9-1.866151969676573E-9i 7.188501946081434E-10-4.920852495171791E-9i 9.388436629212906E-7-1.824709848529654E-7i 1.7016550620128118E-4 1.680362754789913E-4 0 2.125266321691021E-9-1.8816681771946988E-9i 2.8579067952684933E-9-3.842871441381579E-9i 1.08906658231371E-6-2.0987857003275624E-7i 1.652407954033291E-4 1.683517969701097E-4 -5.048693068462553E-6 4.7514106529177096E-8-1.0219889241709936E-8i 5.548076660608668E-8+3.939563367230449E-9i 1.120903730946127E-6-2.2109937037546692E-7i 1.7597155650762937E-4 1.6861448296385563E-4 -5.099842727481499E-6 4.4597892610031764E-8-8.842486538630907E-9i 4.8137650594970704E-8+2.8164725334775275E-9i 1.0258505884092468E-6-2.0432713815984502E-7i 1.1807942034409576E-4 1.62665158071253E-4 -3.155274351718647E-6 4.4324929982889986E-8-1.4172924757329535E-8i 7.932667243317844E-8+9.6370050702567E-9i 1.733482057692435E-6-3.2808914436394823E-7i 1.2406595396567119E-4 1.6291331103645515E-4 0 2.6170674608897806E-9-2.485787137067319E-9i 2.0829994191023476E-9-6.44795843970751E-9i 1.6650772771713842E-6-3.0180949503617894E-7i 1.2123034820227499E-4 1.6158239347233518E-4 -4.166547175188608E-6 5.688634187209538E-8-1.720525246514196E-8i 1.1115198225266208E-7+1.9290186691904292E-8i 1.7066727802834378E-6-3.156154300858998E-7i 1.271638290877919E-4 1.6412451785825688E-4 -3.4666476255205706E-6 4.4993337277630496E-8-1.3274861522093867E-8i 7.293840288563155E-8+7.811640980456457E-9i 1.5864020229289354E-6-3.0182317336354485E-7i 1.1991833166865639E-4 1.625162...
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This document was uploaded on 01/24/2014.

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