H_75nm_L1_65um_D_4um

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Unformatted text preview: 572E-4 0 8.545761003666104E-10-1.3768195057641598E-9i -6.898890736767541E-10+1.0005564739734693E-9i 5.12782437979971E-7-1.2335818063827347E-7i 1.567598181460439E-4 -1.8631285908525297E-4 0 2.0015033785872656E-9-1.5548805681892631E-9i -1.8497810152061877E-9+3.0335831276396966E-9i 1.0549781703871856E-6-2.396896595125155E-7i 1.6571330648603805E-4 -1.8405672340955685E-4 0 1.3067325253310392E-9-1.5306023480459595E-9i -1.095634206334446E-9+3.195524770769856E-9i 1.0005113911952736E-6-2.242253581522691E-7i 1.7320359672847254E-4 -1.8366565570648117E-4 -1.1532609438769914E-5 8.333260607248861E-8-1.948237285994475E-8i -6.664975061433601E-8+6.21228820124462E-9i 9.376428030401486E-7-2.1311263992833E-7i 1.7651674674813532E-4 -1.8688236585516073E-4 0 9.377790856682743E-10-1.5523181144476949E-9i -1.1286819276185197E-9+2.9449557463977724E-9i 9.064723385923126E-7-2.063430335670397E-7i 1.9641736800072278E-4 -1.8639106959791933E-4 0 8.049293961597558E-10-1.5346642732771115E-9i -7.54151234222971E-10+2.6428541109628748E-9i 7.843470218447364E-7-1.7980952130385534E-7i 1.8522736882627046E-4 -1.8400858205536895E-4 0 1.1806351649272706E-9-1.6678434828092355E-9i -1.2348460782011204E-9+2.867718108714567E-9i 8.643317493112874E-7-1.9454443853151923E-7i 1.9277845674984184E-4 -1.8340610490700151E-4 -1.0987264223605586E-5 6.811291028688037E-8-1.513210331538665E-8i -4.931481407170607E-8+5.32249885223735E-9i 8.121683347813702E-7-1.8537226737849362E-7i 2.0305318724647592E-4 -1.9999999999999993E-4 0 -1.9514018205625847E-10-1.2070728592024142E-9i -3.1198316349781843E-10+2.136254122526693E-9i 7.001818218808588E-7-1.6657778633014304E-7i 2.2317426347897895E-4 -1.9999999999999998E-4 0 1.793233665870904E-10-1.268830870386412E-9i -5.369768384640677E-10+1.6141724777212253E-9i 6.104868472284358E-7-1.4654034905563935E-7i 2.452522306700729E-4 -1.9999999999999996E-4 0 -4.026190252837312E-10-1.0733222998846202E-9i -3.3032933673426E-10+1.1938557123596849E-9i 5.272734763907668E-7-1.279429944399532E-7i 2.592773973397825E-4 -9.529545036354411E-5 -1.3837956824751474E-5 7.760626589450414E-8-1.189834721671857E-8i -1.8103078052154272E-8+2.9792621820827044E-9i 6.44190889832483E-7-1.4320477116722898E-7i 2.595161794492213E-4 -1.081622149436219E-4 0 1.2752400080563144E-9-2.1097232599772634E-9i -3.530058603504559E-10+3.8782856982538474E-10i 6.3290996082165E-7-1.3999103543893538E-7i 2.530863470966302E-4 -1.1510205012501741E-4 -7.897481239506824E-6 4.6341408146079635E-8-7.256676896671499E-9i -1.3727674402888622E-8+1.9499978488543307E-9i 6.545525964924445E-7-1.4321198208330472E-7i 2.5457437434782957E-4 -1.2399952096939646E-4 0 1.9968570553054003E-9-2.2212853226071485E-9i -5.998790893084459E-10+5.049027085115705E-10i 6.33609331948108E-7-1.4035206926496927E-7i 2.711208053777921E-4 -1.3498039545888882E-4 -1.4994433297656802E-5 6.029852110432048E-8-1.2530738238708917E-8i -2.1056312034245704E-8+3.8609889980438366E-9i 5.355781160387125E-7-1.2582435109669014E-7i 2.624509404517535E-4 -1.2090786140694447E-4 -1.697584948984354E-5...
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This document was uploaded on 01/24/2014.

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