H_75nm_L1_65um_D_4um

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Unformatted text preview: 936839772424E-7-2.2716722398193719E-7i 1.6316369139291726E-5-4.260730414110801E-6i 3.518133216642453E-5 -7.417339020580809E-6 0 2.3499083501299368E-8-3.631278180926678E-9i -3.2863376902992484E-7-2.926259900432439E-7i 1.5873544503691236E-5-4.06285427550777E-6i 3.492966507502599E-5 -8.198888765591154E-6 -1.1058973327387761E-6 6.241663672539468E-7-1.5569561617422814E-7i -3.183723674729218E-7-2.2498416291999923E-7i 1.6099872259159158E-5-3.9652946388779185E-6i 4.182899888914985E-5 -6.638287135669271E-6 -1.5521679615230662E-6 6.155447031315939E-7-1.569305802220611E-7i -2.5187682770924645E-7-1.4914723482397659E-7i 1.2866137739576018E-5-3.272244788190736E-6i 4.121426054263487E-5 -6.204123671810297E-6 0 1.857314337189164E-8-8.781526912582382E-9i -1.5747793400483426E-7-2.50346889372349E-7i 1.3110861463165339E-5-3.469033641359988E-6i 4.029375381262888E-5 -7.4194066084409085E-6 0 1.8763834384409133E-8-6.1917775397620405E-9i -3.2256238534258297E-7-2.9314643404213595E-7i 1.3451733051524454E-5-3.453072865068844E-6i 4.10784143895788E-5 -8.637764743286736E-6 0 1.651434555910436E-8-4.454490198924077E-9i -5.451754885699156E-7-3.7683477282501874E-7i 1.328153208514519E-5-3.2499704006134653E-6i 3.93697963868095E-5 -8.637772497687843E-6 0 1.3506111350407995E-8-7.321381941200258E-9i -4.7272454001545673E-7-3.66044629403206E-7i 1.3922585453363892E-5-3.4333022279264465E-6i 4.0576566981160846E-5 -8.475672939286244E-6 -1.2101229183435042E-6 5.074763582280548E-7-1.3025249561047368E-7i -2.868890756750683E-7-2.230925332651882E-7i 1.3431801256382677E-5-3.2805408423169046E-6i 3.951501622953548E-5 -6.208590693114468E-6 0 1.6701467307235485E-8-7.608773633371868E-9i -1.936393207218599E-7-2.2982378843110695E-7i 1.3770833105551455E-5-3.6257315104643884E-6i 4.01601289817489E-5 -5.894794713839167E-6 -1.030512643368226E-6 4.5365526286054055E-7-1.158729353485286E-7i -2.4383052983220023E-7-1.3029453823974832E-7i 1.3520486906812605E-5-3.498623011373588E-6i 3.8589952418967104E-5 -7.421940548547617E-6 0 1.8800932828517507E-8-5.715090611405997E-9i -3.3138983038755836E-7-2.9514761632133876E-7i 1.4188052887853072E-5-3.6387512719219307E-6i 3.936078318644763E-5 -7.29420955954905E-6 -1.232910156249995E-6 5.544562490810602E-7-1.3928707744188712E-7i -2.809816484896623E-7-1.8862760511399135E-7i 1.389063231074385E-5-3.5001764901554894E-6i 3.8723466504779544E-5 -6.051721918797366E-6 -1.2374073736370344E-6 5.788631788438845E-7-1.4652636732973246E-7i -2.5746091872700523E-7-1.2568975535508404E-7i 1.4162429422520618E-5-3.6391943717675006E-6i 3.781467315766936E-5 -6.208192332117841E-6 0 1.730504680562883E-8-6.969052515373314E-9i -1.6167541475146748E-7-2.3487541823846876E-7i 1.4586468587538313E-5-3.8346259122596584E-6i 3.611497756505918E-5 -6.20825850515646E-6 0 1.1791036684338562E-8-4.884180574367601E-9i -1.7317364672745394E-7-2.229875294662431E-7i 1.5444446882058515E-5-4.047566391574349E-6i 3.706038798501975E-5 -6.091936810505319E-6 -1.2539421569656766E-6 6.391187497673134E-7-1.5962569500673675E-7i -2.659905569...
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This document was uploaded on 01/24/2014.

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