H_75nm_L1_65um_D_4um

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Unformatted text preview: 9E-8-8.941001276013596E-9i 5.614202566227632E-7-6.185154296122228E-7i 3.3314040768548456E-5-7.566695689876445E-6i 1.821209793256399E-5 -1.034617119015051E-5 -1.1126823231855937E-6 1.9282081471217166E-6-4.608883619108134E-7i -3.760122577299444E-7-1.4179006713503032E-7i 3.213294288647922E-5-7.549856463804315E-6i 1.453262225666152E-5 -1.0000000000000003E-5 0 3.773524781767549E-8-6.6214130266713705E-9i 6.117863786967848E-7-6.799322738599629E-7i 4.034212084595588E-5-9.19227839797212E-6i 1.6243075112950582E-5 -1.0E-5 0 1.710785803138338E-8-5.004939684668292E-9i 5.12318194697811E-7-6.001161306441126E-7i 3.6386652653218436E-5-8.290627002297303E-6i 1.4797204288125647E-5 -1.0541353848567426E-5 -1.179647110611643E-6 2.7673984455037213E-6-6.599949801251032E-7i -6.195950147938699E-7-7.4943922474726E-8i 3.875496117386433E-5-9.13167669106471E-6i 2.509794357260023E-6 -4.444150962991579E-6 0 4.7265157840448507E-7-2.1074927506669825E-7i -9.393750465686024E-8+4.79389350098447E-8i 1.268965434058224E-4-2.977290119405879E-5i 2.4257989184576936E-6 -3.520264898081003E-6 0 7.124991938668149E-7-2.502184421982823E-7i -3.766349791376952E-8+2.8906930649510998E-8i 1.3063994768685693E-4-3.065613110103146E-5i 2.414888233025527E-6 -3.964154880752245E-6 -1.0980001014338108E-6 1.948016799856682E-5-4.652036172520116E-6i -2.841959248288128E-6+6.903933960700989E-7i 1.2801560166645715E-4-3.0062016940755376E-5i -2.237876844504651E-6 -3.974968255227474E-6 0 2.6748799922191036E-6-7.247573640213612E-7i 2.0666392986229408E-7-6.054113647346871E-8i 2.826234787682194E-4-6.605534763726162E-5i -2.2877947196663006E-6 -3.4413390875614346E-6 -1.1215149579374754E-6 6.87788516479896E-5-1.6088989497100863E-5i -4.7400223048729555E-6+1.119677584695299E-6i 2.7523293193018145E-4-6.435204808926794E-5i -9.892163214752863E-7 -3.576489912181116E-6 0 8.85912319833343E-7-2.958695407220849E-7i -3.055536148801766E-7+6.958438254767163E-8i 2.2303756025525095E-4-5.2206331870225434E-5i -1.4054041702379388E-6 -4.271707101237872E-6 -9.144685504091647E-7 4.279469922062512E-5-1.0045608689638663E-5i -5.246817602898074E-6+1.2316053688428331E-6i 2.3076095664701477E-4-5.399501602777442E-5i -1.9795762591828033E-6 -2.9793359236743072E-6 0 1.78447111661468E-6-5.059698938793465E-7i -1.5047460879903861E-7+2.740486345195351E-8i 2.717135102573469E-4-6.3542521584641E-5i -1.8811178032680677E-6 -2.352674023205429E-6 -9.492111280954289E-7 5.2495835929869993E-5-1.230675715986136E-5i -3.2840295598946586E-6+7.727700966827603E-7i 2.620822655053655E-4-6.1307657714133E-5i -2.871817511679493E-6 -3.054315605560188E-6 0 1.9458834768261435E-6-5.493587266524116E-7i -3.047168102210049E-7+5.2748977269478914E-8i 3.3167065955055344E-4-7.748783770976982E-5i -3.4921329445180657E-6 -3.912071255699049E-6 -8.549367522869226E-7 8.675376730008182E-5-2.0244211972950468E-5i -8.04770098647794E-7+2.3174809853888816E-7i 3.645022475384119E-4-8.507495968209836E-5i -3.763478992203334E-6 -3.2082463151553793E-6 0 2.63810537603417E-6-7.143496745583919E-7i 2.008043784994882E-7-8.3685...
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This document was uploaded on 01/24/2014.

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