H_75nm_L1_65um_D_4um

3456831386370577e 6 6658481656198395e 7i

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Unformatted text preview: 12432873723E-8i 3.261533900121698E-8-1.217388215645563E-8i 1.9046616922381094E-5-4.639366026316853E-6i 1.658759346109553E-5 2.9427475208617954E-5 0 -1.2109892935119989E-8-1.3829727129251778E-8i 6.005311010855029E-9-6.421400567125933E-9i 2.456497128978159E-5-5.9557752842178115E-6i 4.4851368031165345E-5 4.907460540361324E-5 0 -8.335898088487694E-9-7.862679244231147E-9i 7.2558033548456025E-9-6.184035712297307E-9i 9.000074394465796E-6-2.188077199523732E-6i 4.924603642889138E-5 4.529527062840961E-5 -8.104756661161298E-6 1.3549938149493193E-6-3.732886282396685E-7i 5.48566018024013E-7-1.341889468516746E-7i 8.334074625342967E-6-2.0184429594238922E-6i 4.701427470161878E-5 5.4211683876266895E-5 -7.347187051453566E-6 1.1280999999874587E-6-3.1345091077651826E-7i 5.332560025948178E-7-1.3097186171738073E-7i 8.129985957153626E-6-1.977343881664456E-6i 2.5317365856423636E-5 3.9190568949701814E-5 0 5.3569659690905376E-8-2.546226744945608E-8i 1.648312105937326E-8-9.233964873866887E-9i 1.5824579862775532E-5-3.875171855594575E-6i 3.487050313734928E-5 4.449941359836985E-5 0 -4.804124587659446E-9-9.521731121479913E-9i 1.5574242893098033E-9-5.264223188904874E-9i 1.1641826660847288E-5-2.8547359173692442E-6i 3.190255149346208E-5 3.653725250053515E-5 -6.761826636837479E-6 2.4045334814276303E-6-6.025658821913037E-7i 1.0982780858453528E-6-2.6002233011593827E-7i 1.3416513477169975E-5-3.284270519451533E-6i 4.071977101728577E-5 3.786853375355326E-5 -9.527467871851429E-6 2.373709401928458E-6-6.079971183747127E-7i 9.411392275206879E-7-2.238114285361214E-7i 1.0505936323874407E-5-2.5686193854681794E-6i 4.427099303428394E-5 6.159146852973637E-5 -7.41822777420064E-6 1.055044340276569E-6-2.9213713459309146E-7i 5.654927659684454E-7-1.3943827694462594E-7i 7.99311389092117E-6-1.9556129054962246E-6i 3.616818832007407E-5 5.871449673475829E-5 0 -9.477896311838414E-9-6.781354599000383E-9i 6.92242316427683E-9-7.527676388684969E-9i 9.669012721427747E-6-2.3827899423838178E-6i 2.2097133408230062E-5 2.6328583628396075E-5 -6.9309817261091785E-6 5.040903760113234E-6-1.22336190075162E-6i 2.2673511587805745E-6-5.25673957058786E-7i 2.029920305291225E-5-4.933150728826425E-6i 1.2017895149826825E-5 2.9147396070298504E-5 0 3.9345965093667834E-8-2.749031194904106E-8i 4.195393252630353E-8-1.5905326088312688E-8i 2.8987503944304105E-5-7.012413039408916E-6i 1.2319938931401243E-5 2.7844842181608766E-5 -5.9687947941879125E-6 6.77806474382871E-6-1.631942544428237E-6i 4.336011512758367E-6-1.0121068666896728E-6i 2.8308631831512732E-5-6.851469284703619E-6i 7.0900813106554894E-6 3.149471332862411E-5 0 -3.8247538006269755E-8-1.0218959351287961E-8i 9.507480527722826E-8-3.1144208369313E-8i 3.284789222692139E-5-7.943379832328027E-6i 1.9781024493097284E-5 3.5375197611708456E-5 -6.717842431145735E-6 3.862751542710617E-6-9.47959900024017E-7i 2.236019696497361E-6-5.263928476784093E-7i 1.8858265457134862E-5-4.60941724538672E-6i 4.614077142226141E-5 1.0358163914215296E-4 0 9.922024073081111E-9-6.60373002852452E-9i 1.0218860296789904E-8-8.771296891566427...
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This document was uploaded on 01/24/2014.

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