H_75nm_L1_65um_D_4um

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Unformatted text preview: 119E-6i -2.793226778575013E-4+4.2710318464712124E-5i -3.636851836949133E-4+9.058035725352954E-5i -1.6417840995994884E-4 -1.173322587999955E-5 0 -1.6111381331874235E-5+4.316384982994137E-6i -3.0813158370361177E-4+4.4369059116484204E-5i -3.7583587604094674E-4+9.44459735702262E-5i -1.611919270259685E-4 -1.0610004443156465E-5 -1.932586614855309E-6 -1.358332513317762E-5+3.6593042369323766E-6i -2.585055371552651E-4+3.56542755917449E-5i -3.9625522543693017E-4+9.280952387867877E-5i -1.6058073740657532E-4 -1.1566335459893415E-5 0 -1.2324310016805942E-5+3.2941542232085245E-6i -3.0169639173841363E-4+4.2137789503111324E-5i -3.745168914454375E-4+9.354461269428425E-5i -1.621464081529767E-4 -1.3721868505612846E-5 0 -1.770825530223751E-5+4.8692411512669846E-6i -2.9718000459401584E-4+4.552855997872132E-5i -3.3392937825765047E-4+8.838447170313155E-5i -1.5990243637605098E-4 -1.3783894014019788E-5 -2.0955977009115176E-6 -1.7102458783078544E-5+4.666878529093037E-6i -2.5781121092172647E-4+3.962705050216919E-5i -3.3182292566948075E-4+8.452100364591258E-5i -1.5109430085450459E-4 -2.2503333115557333E-5 -4.0450919746121155E-6 -1.2005229727980204E-5+3.322974364014123E-6i -2.192137819669006E-4+4.1004125489397074E-5i -2.2505255706325132E-4+6.533365995653437E-5i -1.484968695567471E-4 -1.863030213392899E-5 -4.577790119263627E-6 -6.744475241276017E-6+1.7764644897583514E-6i -2.160895749675013E-4+3.7308980477587625E-5i -2.6147021763126265E-4+7.078145588265378E-5i -1.51832617190581E-4 -1.688642678050446E-5 -4.843645745348781E-6 -1.0750721818113436E-5+2.9066585175913394E-6i -2.1420659610699644E-4+3.56948637383801E-5i -2.8091192437154335E-4+7.352374373452059E-5i -1.62371289660851E-4 -2.6464419020021693E-5 -3.2455275001374975E-6 -3.666019949415601E-5+1.0669734004803334E-5i -2.252203801951786E-4+4.603680024631673E-5i -1.929974251468084E-4+5.95866211983202E-5i -1.6242820404777043E-4 -2.597763469845018E-5 0 -3.663955898389193E-5+1.0762846024451692E-5i -2.517134126613733E-4+5.144789108986932E-5i -1.9356253869273464E-4+6.293122587635105E-5i -1.662254500342044E-4 -3.092984830600067E-5 0 -5.146937031280732E-5+1.5427041053082957E-5i -2.3611317742337073E-4+5.215714800905491E-5i -1.5863450612267795E-4+5.419519123200482E-5i -1.6472040114362622E-4 -2.246314031536976E-5 0 -3.762865312369537E-5+1.0861120396024157E-5i -2.683977292102037E-4+5.2026632894636655E-5i -2.2425546233090511E-4+6.939713886954854E-5i -1.6760546962192593E-4 -2.5769432229664824E-5 0 -4.9694252460654496E-5+1.4581635738616134E-5i -2.596919791982903E-4+5.363801433543631E-5i -1.9544370556956242E-4+6.299489548546402E-5i -1.5492291123459615E-4 -1.7497473473467379E-6 -1.9003628829445848E-6 -2.82675887704834E-6+6.90484921657177E-7i -2.443459245252885E-5+2.7231018599546916E-6i -5.235322452954817E-4+9.930569569470821E-5i -1.5678761084588416E-4 -1.10085072691933E-6 0 -2.7603946555118567E-7-2.1933801298537218E-8i -1.1178106894470043E-7+1.6362736479250524E-8i -5.391346396789005E-4+1.0141740694919184E-4i -2.1905977669862034E-4 -1.4629447221842118...
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This document was uploaded on 01/24/2014.

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