H_75nm_L1_65um_D_4um

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Unformatted text preview: 6790049865E-4 0 8.606456818049946E-9+2.0374064580503455E-9i -5.341055773913022E-7-2.502589303473209E-7i 1.5209114503533035E-6-1.9661683251299996E-7i 1.5034486552359443E-4 -1.5396863784969536E-4 -1.4418271823464175E-6 2.4664172984473605E-8-1.866999600430376E-9i -3.554172007926362E-7-1.5938340101586839E-7i 1.5877852358846126E-6-1.584435946111555E-7i 1.4909315364568978E-4 -1.5350538856352485E-4 0 6.931442619182721E-9+1.1763532018057785E-9i -5.343260887834344E-7-2.521840010626186E-7i 1.612445346630007E-6-1.6376491491568858E-7i 1.4883593626953837E-4 -1.5251221017427126E-4 -1.8444960803696238E-6 3.3139010641497206E-8-1.0204086832054455E-9i -3.954996914407378E-7-1.738255741470559E-7i 1.504649560063847E-6-2.1817773092323792E-7i 1.4729419136649228E-4 -1.5303595287409648E-4 0 7.504638816603686E-9+1.5067827614819728E-9i -5.481402737913532E-7-2.5716770726862444E-7i 1.591084454842487E-6-1.911392988830133E-7i 1.4527628661398792E-4 -1.5315177337011466E-4 -1.0086492662424955E-6 2.0284273081691562E-8-8.93980245907089E-10i -4.417475597544036E-7-2.0157225340663912E-7i 1.6094558730823243E-6-1.9558638829240625E-7i 1.4567429566316945E-4 -1.5352920743841658E-4 0 1.5069029220866296E-8+4.7255995485765266E-9i -5.788846192271633E-7-2.728589726941344E-7i 1.6570135247215549E-6-1.706394072662483E-7i 1.4849295039481516E-4 -1.5427836141251286E-4 -1.6921937546145968E-6 2.807281983222728E-8-2.4748400444070838E-9i -3.206624439397951E-7-1.4041002721471082E-7i 1.6002166649273184E-6-1.6469863756639856E-7i 1.4384589960786184E-4 -1.5300332597339422E-4 0 7.72460051762993E-9+1.6606205451145813E-9i -5.533984008097027E-7-2.59658548050616E-7i 1.6110468049798124E-6-2.1031408432586856E-7i 1.4219196261741436E-4 -1.535082410573724E-4 0 3.387536052015805E-9-5.102186447256438E-10i -5.655164621359997E-7-2.671956173777887E-7i 1.6880992565107914E-6-1.8466611681766729E-7i 1.4315848193513741E-4 -1.5371241287238816E-4 -1.4025714345719538E-6 2.52081910974957E-8-1.988437611976391E-9i -3.987970935987138E-7-1.790714921846761E-7i 1.6567266206173887E-6-1.86337947758429E-7i 1.836364929682896E-4 -1.531944262770696E-4 0 1.2700966137667302E-8+4.1308993189645425E-9i -3.5422858909277264E-7-1.6946641348200564E-7i 1.153271439472432E-6-1.4742246711926656E-7i 1.7942993625313995E-4 -1.531896482820724E-4 -1.5263142573783258E-6 3.045452310805694E-8+3.355378265049191E-9i -2.8194558046872894E-7-1.272754423277773E-7i 1.188098285888605E-6-1.5340107187635257E-7i 1.784021828861699E-4 -1.5324950322874835E-4 0 1.2006104338361037E-8+3.712367468641786E-9i -3.9123503207602606E-7-1.860991579924736E-7i 1.218014778516876E-6-1.4741955861752388E-7i 1.7792128906210172E-4 -1.5416427542807573E-4 -1.2531079539470142E-6 2.4442189211753425E-8+2.028579142079184E-9i -2.594398639489388E-7-1.1746001798485818E-7i 1.2621330118900734E-6-1.2245650049306188E-7i 1.8022054699697544E-4 -1.5332075520679746E-4 0 1.4497746693637511E-8+4.878659938599254E-9i -3.8179742262059273E-7-1.8220420917283882E-7i 1.1959208555348702E-6-1.4678595502301147E-7i 1.8194791097140114E-4...
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This document was uploaded on 01/24/2014.

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