H_75nm_L1_65um_D_4um

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Unformatted text preview: 18647010507693E-6-1.041931358184357E-6i 1.3516779836799612E-5-3.6646811041551496E-6i -1.5027128820873474E-4 1.8379064116010374E-4 0 -4.005616134158104E-8+2.0082769782425798E-8i -9.77120701871194E-8+2.9150109143257052E-8i 1.1098566130073106E-5-3.001168719365411E-6i -1.4461811575494562E-4 1.503515958297654E-4 -1.8559034328269617E-6 -6.731735381219949E-8+1.7189844253107447E-8i 3.6119165760902384E-5-9.55325338776957E-6i 2.8484259347667752E-5-8.397573814581077E-6i -1.4662592555729752E-4 1.4922450944426205E-4 0 -2.77600452315128E-7+8.013799327551442E-8i 4.1221405417667716E-5-1.0982019403408458E-5i 2.611018463122483E-5-8.067121330656941E-6i -1.482718763877847E-4 1.4846668014780877E-4 0 -4.5546739813808545E-7+1.377811172382428E-7i 4.099654955702636E-5-1.1036447936687363E-5i 2.4396001490097737E-5-7.618799870002713E-6i -1.4489749968960768E-4 1.4848805659694719E-4 0 -1.3431523629282435E-7+3.1976146279422135E-8i 4.1130201141490393E-5-1.1075688111311398E-5i 2.4439250634378287E-5-7.634044972912122E-6i -1.409722732345742E-4 1.4587272499694682E-4 -2.5412757838926504E-6 4.567760015490869E-7-1.5988380883957524E-7i 3.7335948030274984E-5-1.037218731572749E-5i 1.965820972966507E-5-6.0852346437982915E-6i -1.4639930875188595E-4 1.4648058860508532E-4 0 -3.517201934409388E-7+9.876316896187851E-8i 4.11153558372737E-5-1.1340666603050311E-5i 2.0667991882173998E-5-6.625849168781618E-6i -1.4384640132262974E-4 1.472745116497111E-4 -1.9297107145650815E-6 2.4513730532017135E-9-1.2887982997246879E-8i 3.774767461035465E-5-1.0348610075068007E-5i 2.191079772808904E-5-6.7432662852733145E-6i -1.444611926737554E-4 1.4347443406943517E-4 0 -1.1356064714240209E-7+1.5871183653457976E-8i 4.1226678191141356E-5-1.1720161599158715E-5i 1.65238624865721E-5-5.445308187218024E-6i -1.4100539840632733E-4 1.4266012914400375E-4 0 5.791599513905552E-7-2.0899358805347455E-7i 4.121026306198525E-5-1.1793394145164659E-5i 1.5558591266381056E-5-5.156721968523009E-6i -1.3779853035970552E-4 1.435641352936878E-4 0 1.148791854779558E-6-3.8707715954497614E-7i 4.0914354688748256E-5-1.1598250773513684E-5i 1.667199224542326E-5-5.482278130454272E-6i -2.0551953395993273E-4 1.5038054424790107E-4 -1.645099122431582E-6 -4.392808349218923E-6+1.0597608896227919E-6i 1.1422508382188945E-5-2.435465742432752E-6i 1.7773936124510988E-5-5.192698068844786E-6i -2.0363260444109118E-4 1.5106238681262217E-4 0 -3.3337709279333654E-6+8.048263436500561E-7i 1.4256965248064237E-5-2.9329867468847E-6i 1.8859853636137817E-5-5.576843651941615E-6i -2.0852739921228122E-4 1.4959889166384218E-4 -2.2987663579104323E-6 -5.1275025000357615E-6+1.1893616315509168E-6i 9.08583547022824E-6-1.954941757459144E-6i 1.682497756550277E-5-4.917110185435718E-6i -2.0741113581631908E-4 1.4889758684777897E-4 0 -5.388669645182061E-6+1.2289023746941206E-6i 1.0877301832310138E-5-2.279833793014663E-6i 1.6719471298072956E-5-5.143842639207554E-6i -2.0489825768543187E-4 1.4818537170611533E-4 0 -5.852660662464607E-6+1.4068599775013402E-6i 1.2972929784044879E-5-2.85086582267612...
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This document was uploaded on 01/24/2014.

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