H_75nm_L1_65um_D_4um

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Unformatted text preview: 93405513E-7i -4.0273039139092824E-8-9.314530590697386E-9i 5.802809387380578E-6-1.4157220046854864E-6i 6.591218383107044E-5 -2.145790341331945E-5 0 1.0143695210727312E-8-2.624188263806281E-8i -2.6983161917594595E-9+3.029134693728272E-9i 7.160794608530887E-6-1.5040525468897746E-6i 6.53692161419149E-5 -2.4113977110403064E-5 0 9.631796000749218E-9-2.4415107838129772E-8i -2.818102166554648E-9+2.9693971910233624E-9i 7.152455669819438E-6-1.5258263611267128E-6i 6.71242380014272E-5 -2.3490156280108992E-5 1.599869969676193E-6 -8.126672798731203E-8+1.0187034948843838E-7i 2.353336047698457E-8-8.010652928271852E-9i 6.976074422061141E-6-1.4391542778888558E-6i 6.899999999999998E-5 -2.5247333483832465E-5 0 8.32842476812661E-7-3.2251043247417436E-7i 3.852605789944619E-9-7.692562142835868E-10i 7.13260276360983E-6-9.38126503091663E-7i 6.735508326720737E-5 -2.4636210881356024E-5 0 -5.103497887363631E-8-2.8693513847671033E-8i -2.4491421936136323E-10+3.046239254396653E-9i 7.014220661371955E-6-1.369898069867712E-6i 6.790992870109869E-5 -2.6207934772373617E-5 0 -9.040234443184829E-9-2.343233641762222E-8i -4.056631221757292E-9+7.940223704539768E-9i 7.013602555056282E-6-1.2622012352775393E-6i 6.63217247209116E-5 -2.6322002224119885E-5 0 1.1260601511572238E-8-2.6681914381491284E-8i -1.4711140522629996E-9+4.2022379167251196E-9i 7.032162366862017E-6-1.4438329068272592E-6i 6.899999999999996E-5 -3.390962278856083E-5 0 7.432634404173844E-7-3.283656857113148E-7i 3.4491343114950723E-10+7.446202321403916E-9i 7.060556399512974E-6-8.36664408504495E-7i 6.787602855401566E-5 -3.480378149492883E-5 0 8.871473542030722E-9-1.7242557861405378E-8i -7.424558998487876E-10+9.215694559354758E-9i 6.819731289656017E-6-1.2208473942216592E-6i 6.899999999999997E-5 -3.2177164927615165E-5 0 5.806084776076783E-7-2.732886842356295E-7i 2.1584092446217767E-8-3.036871743083055E-8i 7.041235832917307E-6-8.795390433648473E-7i 6.723008585192857E-5 -3.30577057928807E-5 0 -4.477020124364541E-8-3.430941694854486E-8i -3.232631751447527E-9-1.841278688546888E-9i 6.838881189008643E-6-1.3229709251938193E-6i 6.811472505107024E-5 -3.249975742450962E-5 8.334725530049861E-8 1.4507086505254757E-7+4.3323208473791674E-8i 1.6733844559156663E-8+4.110984522850275E-8i 6.900154261544007E-6-1.1656201795345446E-6i 6.899999999999998E-5 -3.04447070666695E-5 0 5.519455863360521E-7-2.505632532144437E-7i -7.840510925690344E-9-7.464585246215924E-9i 7.066685222947844E-6-8.507947573029492E-7i 6.719225084917036E-5 -2.9742524637183822E-5 0 -5.90830957702352E-8-5.162202110984811E-8i -3.5256818942401403E-9+2.315878226035996E-9i 6.90370719751338E-6-1.3708595730154898E-6i 6.899999999999998E-5 -3.200369488273971E-5 7.500000000000002E-8 3.670516116029882E-8+1.7967361885284316E-7i 7.584538871951985E-9-1.909159257074133E-9i 7.159017585164575E-6-9.164377478284466E-7i 6.782467623488103E-5 -3.143514926407E-5 0 -5.402121444086062E-8-1.85093995413785E-8i -3.1415631606551697E-9+1.4188122436268836E-8i 6.899596863494174E-6-1.2501837660159485E-6i 6.83949649254504E-5 -3.2992997...
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This document was uploaded on 01/24/2014.

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