H_75nm_L1_65um_D_4um

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Unformatted text preview: 92768E-6-2.6357639561477094E-7i 2.0826118913631303E-4 -1.2425628949156003E-4 8.712028204843436E-6 -2.2287940183083923E-7-6.144373847555141E-8i 8.148496896731072E-8+2.109644661226928E-8i 8.613624099031429E-7-2.2324503707139772E-7i 2.0675811265937014E-4 -1.46091291701719E-4 5.074361435628169E-6 -1.0576000982278129E-7-2.917853747717296E-8i 1.1012024429595084E-7+4.3458746607474524E-8i 8.447658193079708E-7-2.0235249550204281E-7i 2.3364217258649785E-4 -1.446225486962498E-4 8.205116198534939E-6 -5.2945157535729515E-8-3.295892977308206E-10i 2.3692680661865136E-8+1.1361338443069843E-9i 7.063002303354468E-7-1.5180655766749747E-7i 2.4061618864765284E-4 -1.3854180668555578E-4 7.919355601650975E-6 -4.638867706525564E-8+1.386307092765185E-9i 1.8246332184289117E-8-1.8920907521980513E-10i 6.790643547057833E-7-1.4791593890905495E-7i 1.5783534207429277E-4 -1.3459476105971593E-4 7.500000000000002E-8 -7.601105287059111E-8-3.6648075376035836E-8i 3.4210203750345114E-7+1.4345137892574772E-7i 1.0942794853491833E-6-4.082707677373656E-7i 1.57714603272518E-4 -1.3677983386966178E-4 4.0650097986218605E-6 -1.0699883255780156E-7-1.931104119007E-8i 3.332573647552981E-7+1.2832887537056909E-7i 1.1364383446017083E-6-3.8263815572868574E-7i 1.539496464585223E-4 -1.3399889314512408E-4 7.500000000000001E-8 -7.061927027536475E-8-3.5049443914514676E-8i 3.5035631700237265E-7+1.4680795895307933E-7i 1.129535098600371E-6-4.261835681105841E-7i 1.506264040650405E-4 -1.3575658165980572E-4 7.500000000000001E-8 -6.006584057747935E-8-3.091543495335747E-8i 3.710398825057591E-7+1.5635110563563034E-7i 1.1713717194816222E-6-4.298178135716001E-7i 1.5095715556095887E-4 -1.3696846481378925E-4 6.470528534514274E-6 -1.2426545290770825E-7-5.3336914304001176E-9i 3.376640603113787E-7+1.2012736541820386E-7i 1.2183544489983941E-6-3.9877867675509333E-7i 1.465468736631961E-4 -1.3484590258851153E-4 7.500000000000002E-8 -5.494513937145322E-8-2.91692240327534E-8i 3.7471521212110507E-7+1.5757457573053333E-7i 1.2102910229583235E-6-4.5168424229069966E-7i 1.6573048372928048E-4 -1.3209220770112512E-4 7.500000000000001E-8 -9.838414197940021E-8-4.51986762546239E-8i 2.986696152771024E-7+1.2458197701974497E-7i 1.014251692632897E-6-3.9070096476025784E-7i 1.6272984341195342E-4 -1.3378643363070594E-4 2.9674022920855614E-6 -1.1250870021289512E-7-3.0342177610018764E-8i 3.076313789776024E-7+1.2047538416891167E-7i 1.0676755819220093E-6-3.8409587655739556E-7i 1.561472221636263E-4 -1.2959264060654306E-4 7.500000000000001E-8 -8.782255476918522E-8-4.1717572886504146E-8i 3.1467898624305476E-7+1.3035908309235578E-7i 1.090321364641804E-6-4.386058896596621E-7i 1.6115677540290535E-4 -1.3046839056836984E-4 7.500000000000001E-8 -9.533351464229186E-8-4.4289123332912764E-8i 3.042913841231395E-7+1.2630697504151246E-7i 1.047584420659774E-6-4.1479467217300296E-7i 1.4344394495626446E-4 -1.360895426013924E-4 3.2319955001653674E-6 -8.273777731185753E-8-1.2670618239085323E-8i 3.7153789448069876E-7+1.444610023491961E-7i 1.2777395859912697E-6-4.4442968801226...
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This document was uploaded on 01/24/2014.

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