H_75nm_L1_65um_D_4um

426809171713622e 6i 7411192923946014e 4

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Unformatted text preview: 1E-6i 3.0653617392970576E-5-9.07032866393013E-6i -1.6411269038448434E-4 -1.5196834037717826E-4 0 -1.0591207692978166E-6+3.197080565138973E-7i -3.8303098770929E-5+9.590646620402191E-6i 3.33131337009277E-5-9.708348981416797E-6i -1.6620667913535848E-4 -1.519108464878404E-4 -1.134622151570181E-6 -1.3545583392743392E-6+4.132945049106987E-7i -3.317587473050221E-5+8.37587018420551E-6i 3.161598209415913E-5-9.095625470857096E-6i -1.655773416518766E-4 -1.5306640610569997E-4 -2.6255064444337852E-6 -1.3935813270284093E-6+4.2083820895252864E-7i -2.5965126625539582E-5+6.593595513156025E-6i 3.258527574303907E-5-9.07551675914907E-6i -1.6703800424919634E-4 -1.5113829856993284E-4 0 -1.473571806622195E-6+4.4497045967948545E-7i -3.7124696436051E-5+9.397324656675285E-6i 2.9318339602389317E-5-8.730529236707768E-6i -1.662596918487892E-4 -1.4995798563103573E-4 0 -1.8384929494664157E-6+5.576289218198194E-7i -3.7248142603402665E-5+9.637096279879915E-6i 2.614420231690163E-5-7.978916416332299E-6i -1.8384176726825738E-4 -1.5419999336599668E-4 -1.3658839268907825E-6 -1.3053889055303556E-6+3.801989223349269E-7i -1.9588894272149706E-5+4.5100793141774775E-6i 3.417312289166578E-5-9.077400601024271E-6i -1.8371129104761312E-4 -1.5538504493741494E-4 -7.827355658533212E-7 -5.250338672269095E-7+1.6375268097612583E-7i -9.727162905848186E-6+2.168384524092737E-6i 3.9394197698505715E-5-1.0102880245210776E-5i -1.8360895990020872E-4 -1.5303880211921267E-4 0 -1.201259345619786E-6+3.4813280417114734E-7i -2.9751759081885626E-5+6.821840572688448E-6i 3.1058759548615904E-5-8.710876205191242E-6i -1.8179308468909363E-4 -1.5447798209589384E-4 -2.2204593416215455E-6 -1.3844591532881252E-6+4.1770532465222376E-7i -1.701805775273027E-5+4.050958632506654E-6i 3.137740217649491E-5-8.411649310880362E-6i -1.813314634139221E-4 -1.5303136043591018E-4 -1.306324423650907E-6 -1.7441723661572473E-6+5.078177258543648E-7i -2.4743570569732113E-5+5.868303132558834E-6i 3.1088751068641604E-5-8.581488366293135E-6i -1.8191877563167641E-4 -1.5136874874815409E-4 0 -2.2183623421766345E-6+6.370222812226232E-7i -3.0107638728062884E-5+7.236374493351687E-6i 2.6237518207992552E-5-7.734403261876355E-6i -1.715103599582189E-4 -1.5173325955120256E-4 0 -1.5091461489449582E-6+4.487231888002257E-7i -3.5355042106542614E-5+8.759073860422063E-6i 3.0089429089513083E-5-8.837096880191415E-6i -1.7403552159281436E-4 -1.510536029849284E-4 0 -1.8928952684044154E-6+5.642406123232413E-7i -3.438790563707085E-5+8.55258312229372E-6i 2.7716091060093768E-5-8.24125927389633E-6i -1.7604530667487858E-4 -1.5272559766303843E-4 -1.5157841847715521E-6 -1.7248763360173063E-6+5.099074619397353E-7i -2.7079723524331918E-5+6.605179543456928E-6i 3.155560910241563E-5-8.809876717798513E-6i -1.7918505876950817E-4 -1.5114931975799685E-4 0 -2.1288747554294216E-6+6.225813173968883E-7i -3.189774555097846E-5+7.773033750308856E-6i 2.6839023865723334E-5-7.935847031921104E-6i -1.768065406394192E-4 -1.513910862824236E-4 0 -1.913138524599952E-6+5.629153433823567E-7i -3.2953793190377...
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This document was uploaded on 01/24/2014.

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