H_75nm_L1_65um_D_4um

440228336968112e 4 2378516891940717e 6

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Unformatted text preview: 1.4162726646486129E-8+9.776612278622539E-9i 9.186165561296098E-7-2.8638780410840093E-7i 2.1211254715686398E-4 -8.210062850716246E-5 4.499199655850586E-6 -3.4217904719546725E-7-1.3584246508744286E-7i 1.5909966897802683E-8+3.3683697821339724E-9i 9.947000586855728E-7-2.1095554146961897E-7i 2.049077794469715E-4 -7.903513595511623E-5 7.500000000000001E-8 -3.72690376918661E-7-1.6774558813587874E-7i 8.679351184735668E-9+8.053758460543074E-9i 9.228813585461908E-7-2.912604322588376E-7i 2.0775197477801972E-4 -7.820645127038898E-5 4.875334648463728E-6 -3.4917139808625494E-7-1.32595537659225E-7i 1.5724754548530832E-8+4.0962395436159046E-9i 9.631115982291547E-7-2.5504781771136433E-7i 2.0456825563932096E-4 -7.111419675003252E-5 3.3423317995687708E-6 -3.5580777409060064E-7-1.4301365520570685E-7i 2.4238022933624155E-9+2.640213014375255E-9i 9.556209232826223E-7-2.882128998745294E-7i 2.0416338239408736E-4 -7.42149226225393E-5 7.500000000000002E-8 -3.692182495813763E-7-1.6719731820651833E-7i 1.0471041055289024E-9+5.96307569814175E-9i 9.283908523550585E-7-2.9996327945690977E-7i 2.0377123074877872E-4 -6.920574104663395E-5 7.500000000000001E-8 -3.6615089717214087E-7-1.674611064837522E-7i -7.684746432061644E-9+3.4431656008890137E-9i 9.368022321009373E-7-3.056531675524368E-7i 2.040287989467454E-4 -7.682732804914487E-5 3.0503435217013908E-6 -3.542333113328413E-7-1.4234681559353935E-7i 1.1379487328292143E-8+5.68817924620206E-9i 9.394448316225854E-7-2.905433754746972E-7i 2.0141275465493098E-4 -8.170515366087053E-5 7.500000000000001E-8 -3.5109063118882483E-7-1.555774610717455E-7i 1.6069236880521774E-8+1.1613028221999985E-8i 9.042659478398692E-7-3.1513840413276843E-7i 1.9997777029438435E-4 -7.632432321600952E-5 7.5E-8 -3.4818392514596176E-7-1.5470828080943294E-7i 5.502560521813971E-9+8.749112829380991E-9i 9.124577883603069E-7-3.284804962547151E-7i 1.9832822254353227E-4 -9.554605618452486E-5 7.500000000000001E-8 -3.17613850724758E-7-1.3749714044461255E-7i 4.8448237188736514E-8+2.3136567394546555E-8i 8.719626980120685E-7-3.237624495213501E-7i 1.996817865027524E-4 -9.165907863276643E-5 7.500000000000002E-8 -3.312344631960601E-7-1.4427770822333187E-7i 3.776907630569932E-8+1.9129265312852834E-8i 8.799766337852559E-7-3.192932754569265E-7i 2.030915799783423E-4 -9.17934244848796E-5 6.424910254267982E-6 -3.2720824394969896E-7-1.0911726945890434E-7i 4.51939706727736E-8+1.1922716065296176E-8i 9.15583712770991E-7-2.8149866345791215E-7i 1.9716161752306036E-4 -1.0972132816566503E-4 7.500000000000001E-8 -2.7145196551550694E-7-1.1723462880239803E-7i 8.491923744624206E-8+3.659559159063276E-8i 8.457674514746634E-7-3.1613344153141074E-7i 1.9798149419541193E-4 -1.1764574874568423E-4 7.500000000000002E-8 -2.4296673560985E-7-1.0581439357539024E-7i 1.0125149839585769E-7+4.296137680199838E-8i 8.333587217678292E-7-3.027368943088797E-7i 1.997900398436412E-4 -1.157340964021529E-4 4.668364777426753E-6 -2.589822133583904E-7-8.942699683684318E-8i 9.52262273349288E-8+3.248224980957968E-8i 8.600758613513893...
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This document was uploaded on 01/24/2014.

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