H_75nm_L1_65um_D_4um

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Unformatted text preview: 9935E-6-6.415092479243709E-7i 1.1203944413460299E-4 1.0351663045834181E-5 -2.1743225470994843E-6 9.282995458456934E-8-2.6975306611788723E-8i -5.386055987827588E-7-2.4224814038700286E-7i 3.3098725589621774E-6-7.810995032482585E-7i 1.0755371301865545E-4 9.199727031959613E-6 -2.215699466698985E-6 9.777516964741135E-8-3.434271645513369E-8i -5.213672952056241E-7-2.401402101079748E-7i 3.5859747282891066E-6-8.090424604007159E-7i 1.0970257266167618E-4 9.773085837073775E-6 -1.6341705841351646E-6 7.000305760819621E-8-2.3100244935760128E-8i -5.705614774239443E-7-2.5848406803659464E-7i 3.449501460150698E-6-7.9838024242213E-7i 1.1291950818937503E-4 1.3098115762350554E-5 0 6.23483608854945E-10+2.4897764290731397E-9i -6.321849457926956E-7-2.70629387487058E-7i 3.088710043605921E-6-8.527460125301455E-7i 1.0993168357835969E-4 1.1560904339852167E-5 0 -3.920654862936183E-9-8.310742165446127E-10i -6.543447512454176E-7-2.862696646047833E-7i 3.297114648991926E-6-8.611182821163996E-7i 9.500012033349597E-5 1.0690899697351485E-5 0 -4.6919884301926246E-8-2.412761687986676E-8i -6.029825951376875E-7-2.71915681755572E-7i 4.120691433309171E-6-1.0866118179186145E-6i 9.731743834771025E-5 1.1544968224655978E-5 0 -4.431267083676854E-8-2.1299186804468632E-8i -6.040284213864812E-7-2.6902544338503445E-7i 3.924885953330268E-6-1.0657442513284145E-6i 1.0028288491105756E-4 8.387929077237823E-6 -1.6471990892800776E-6 7.377664276477832E-8-3.652397418341865E-8i -5.336529466512574E-7-2.514697685082421E-7i 4.015205937813888E-6-8.980214073428891E-7i 1.014539232590697E-4 8.908144401607862E-6 0 -1.3930561007147183E-8-7.251072052373763E-9i -6.901158711537224E-7-3.1604605314016686E-7i 3.893203394922747E-6-9.127080399323693E-7i 1.0004805532575876E-4 1.0732838760265634E-5 0 -2.8863287786933366E-8-1.298737517863473E-8i -6.354841038238073E-7-2.8488841317664784E-7i 3.827657863623605E-6-9.949931229918136E-7i 1.0678929096806279E-4 1.1814239681733844E-5 0 -1.2601026774824154E-8-4.559407531195879E-9i -6.47831234793212E-7-2.843029540996869E-7i 3.424592516310564E-6-9.120486201237377E-7i 1.3928049101356413E-4 1.7866887226766598E-5 -2.1224802014075017E-6 1.0626909430102133E-7+1.0824274111226152E-8i -4.549760304693598E-7-1.7905187661226017E-7i 2.0975218009763174E-6-6.318358854153217E-7i 1.398449476294096E-4 1.7719681460164906E-5 0 5.39609210938652E-8+2.7514074225056553E-8i -5.159748505085717E-7-1.9967112805047043E-7i 2.0590213091668877E-6-6.417269426823995E-7i 1.3674989004200665E-4 1.830628936291912E-5 0 5.08873158509003E-8+2.6411898399481274E-8i -5.174812588432565E-7-2.0054010679333186E-7i 2.121831706423891E-6-6.714948679153997E-7i 1.4221167830992317E-4 2.01173016745152E-5 0 6.405154773726209E-8+3.2494771108599766E-8i -4.775694749333999E-7-1.795101798215083E-7i 1.943548044889544E-6-6.420288519244713E-7i 1.440021185541161E-4 2.1029103728888893E-5 -2.3822762203614855E-6 1.2307777740796958E-7+1.739553036378172E-8i -4.0648833791962567E-7-1.5440321607557522E-7i 1.9117732599725668E-6-6.191048230930544E-7i 1.3950560636964048E-4 2.16232...
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This document was uploaded on 01/24/2014.

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