H_75nm_L1_65um_D_4um

465213147650496e 19i 0 6596791861262378e 4

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Unformatted text preview: 05473509762505E-4 -6.711338553751784E-5 -3.680074925071685E-11+9.01499360210159E-12i -8.334088141499489E-11+2.1332514317866636E-11i 3.165738230177777E-10-7.887221663347565E-11i -3.718463497382176E-4 -6.956548941594045E-4 0 -1.748247816661927E-12+5.156684587869829E-13i -3.435182343679916E-12+3.6908552332232367E-13i 3.2539559873233395E-10-8.074227020975459E-11i -3.7825749369922105E-4 -7.076489440587048E-4 0 1.589407182900405E-13-1.3927639052266518E-13i 2.906176353085737E-13-3.0760765142916993E-13i 2.1184423155884822E-11-4.930632365956036E-12i -3.84668637660225E-4 -7.196429939580047E-4 0 -2.83274823518025E-19+3.715371314519491E-20i -5.212825710493458E-19+6.287945193097177E-20i 2.0622980713799323E-18-2.5357835473952124E-19i -2.862550966640695E-4 -6.910586222859254E-4 0 2.0371165250473766E-9-4.481896934193105E-10i 4.931551106099139E-9-1.3347219658840955E-9i 9.630537546580974E-8-2.5018074025129016E-8i -2.914597347852347E-4 -7.036233245093059E-4 0 -1.4506351829146662E-10+4.8304496230028596E-11i -4.556867956538453E-10+1.1030839051123534E-10i 1.343459543825376E-8-3.4601525548589047E-9i -2.600196640822568E-4 -7.273036287651445E-4 -6.598670984071834E-5 -1.8222927476234719E-10+4.6307789311650477E-11i -5.884541846269739E-10+1.5135030653292192E-10i 2.161637263202276E-9-5.528022016678631E-10i -2.9666437290639937E-4 -7.161880267326866E-4 0 -1.7313277845310445E-11+6.1579868669166544E-12i -4.482244662723616E-11+1.0057365129182875E-11i 2.231388460269427E-9-5.693248487180227E-10i -2.64581412574928E-4 -7.40063341550498E-4 -6.71443714168713E-5 -2.795935205865476E-11+6.777648290947288E-12i -8.51712710277291E-11+2.1872549594088372E-11i 3.1493228592601196E-10-7.921886201750123E-11i -3.0186901102756435E-4 -7.287527289560668E-4 0 -1.2844918007857973E-12+4.885960419095891E-13i -3.313434982847337E-12+4.226780992624159E-13i 3.2371877591763986E-10-8.107795158317853E-11i -3.070736491487293E-4 -7.413174311794473E-4 0 1.1799660049489865E-13-8.682199019748616E-14i 2.6671250392367197E-13-2.685124383333199E-13i 2.1218005911500956E-11-5.0514975147317925E-12i -3.1227828726989416E-4 -7.538821334028277E-4 0 -2.4133153140046706E-19+3.916261663903092E-20i -5.548881393073821E-19+8.262434402661267E-20i 2.099134824591735E-18-3.1677289999889724E-19i -1.825812599588504E-4 -7.231902104852329E-4 -5.624947084340289E-5 -1.863696147675648E-9+5.34747472519397E-10i -2.313887556733413E-8+6.026394472957378E-9i 8.794036949844322E-8-2.2869817031453143E-8i -1.8590091923082955E-4 -7.363391234031463E-4 -5.727218849510112E-5 -6.07077956627596E-10+1.6127781937047995E-10i -3.17393008571495E-9+8.206791063246862E-10i 1.2686220626069687E-8-3.280055915181897E-9i -2.1713924798978434E-4 -7.15789457051653E-4 0 1.752974430039575E-9-3.687855812980508E-10i 4.383561375575184E-9-1.1660002400969635E-9i 9.167518432077278E-8-2.3834742022957496E-8i -2.2108723431687148E-4 -7.288038108162284E-4 0 -1.31445869771308E-10+4.6026231494357156E-11i -4.2007081778058E-10+1.0424637091220412E-10i 1.3123807665200325E-8-3.389084566869478E-9i -1.89220578502808...
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This document was uploaded on 01/24/2014.

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