H_75nm_L1_65um_D_4um

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Unformatted text preview: 31736613E-5i 2.9713240406410773E-5-8.959637324672463E-6i -1.4900185058801317E-4 1.5163910805801646E-4 7.500000000000001E-8 2.150106781124983E-7-4.624457859703224E-8i -4.157428736325149E-5+1.0640041179695489E-5i 3.36415220980013E-5-9.900345069099884E-6i -1.4830749456532744E-4 1.5499999999999995E-4 7.5E-8 -1.9687280856245383E-8+1.876220631497061E-8i -1.4624544547660107E-5+3.451538455312963E-6i 6.989738846484036E-5-1.813064868954533E-5i -1.491470157469966E-4 1.5350469938926677E-4 7.5E-8 7.096160563284977E-7-1.5287304525443295E-7i -4.353194249305327E-5+1.068353005716029E-5i 4.332196564316432E-5-1.2189048339888246E-5i -1.4887908482773675E-4 1.5343602982809294E-4 2.0346053871361907E-6 1.532792311499531E-7-3.308073575666603E-8i -2.938078890469692E-5+7.4924083929935286E-6i 3.8270188123261467E-5-1.0601712769575372E-5i -1.5076449627357132E-4 1.5298822673000422E-4 7.500000000000001E-8 2.5224939673803487E-7-5.041099941756226E-8i -4.2527637880707125E-5+1.0571567031248696E-5i 3.883874370612623E-5-1.1122516302627894E-5i -1.5068639263014799E-4 1.542548758627647E-4 1.068766316082368E-6 -1.2178564840620298E-8+1.3146818919965164E-8i -2.9895784366104193E-5+7.388292984652177E-6i 4.758903306411634E-5-1.2877585217299127E-5i -1.503994653872648E-4 1.505906056949819E-4 7.5E-8 4.91729864077195E-7-1.231031409680098E-7i -4.1014916840757344E-5+1.0694445691202445E-5i 2.9284161576316928E-5-8.850143833150163E-6i -1.4975104541168035E-4 1.5022520474081247E-4 2.5000818906437185E-6 6.080471763225323E-7-1.5816951557079103E-7i -3.465180229128388E-5+9.213302679146498E-6i 2.7243385777741603E-5-8.004459816175085E-6i -1.5000658814839752E-4 1.4843513932478623E-4 7.5E-8 6.849243679069226E-7-1.8260147262603006E-7i -4.083388003879188E-5+1.099514123387554E-5i 2.411729756175421E-5-7.5242935246325955E-6i -1.483291958666988E-4 1.4920874396472106E-4 7.500000000000002E-8 4.156879844161021E-7-9.952344236750787E-8i -4.125605353634196E-5+1.0980406545586102E-5i 2.578900208812037E-5-7.969217404527038E-6i -1.5187315990263778E-4 1.4922335573678072E-4 7.500000000000002E-8 7.630013630528787E-7-2.066796230031781E-7i -4.081198841980709E-5+1.084555604797966E-5i 2.5744674792253622E-5-7.949305648367865E-6i -1.5250733620320308E-4 1.5165918172986104E-4 7.500000000000001E-8 4.955387157413831E-7-1.2580707251238937E-7i -4.070253286103386E-5+1.0411874823655314E-5i 3.3305318390285186E-5-9.7944301424531E-6i -1.526069959624284E-4 1.5349201160380548E-4 7.500000000000002E-8 3.6856169812070503E-7-8.069747088150041E-8i -4.0776155494873234E-5+1.0002499426822125E-5i 4.5013783182881636E-5-1.2559590930239953E-5i -1.5306237873534328E-4 1.534543036459445E-4 2.7533577932326485E-6 5.29833583470243E-7-1.3938721504618E-7i -2.720608471513437E-5+7.005432490725763E-6i 3.43997108450869E-5-9.571739779587246E-6i -1.5422912484015552E-4 1.529850624030569E-4 7.500000000000001E-8 4.0760228126046627E-7-9.717075971638067E-8i -4.240259510324461E-5+1.0502401267013048E-5i 3.9153941852304274E-5-1.1173247328863908E-5i -1.759534527294159E-4 1.5108354835138504E...
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This document was uploaded on 01/24/2014.

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