H_75nm_L1_65um_D_4um

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Unformatted text preview: 847644E-9-1.931652094748619E-9i -3.8580577571248895E-9+5.2001286144082925E-9i 1.1069744743996186E-6-1.7214270305737633E-7i 1.737086642663756E-4 -1.5880359367562624E-4 0 1.912574888927342E-9-1.891582989269165E-9i -2.021237690840855E-9+7.501836463328659E-9i 1.2097924281316436E-6-1.6094819914670979E-7i 1.7625661389878485E-4 -1.5873439199676784E-4 0 1.858059614127201E-9-1.9016199953136685E-9i -4.825332791972767E-9+6.064810911289575E-9i 1.1826703582334287E-6-1.5909612588650507E-7i 1.6646304992558872E-4 -1.570182547817385E-4 0 1.893863973941332E-9-1.968713618714725E-9i 7.911399370750586E-9+1.7012728308707766E-8i 1.3701214576519388E-6-1.3512612545605013E-7i 1.6464686854094523E-4 -1.5694907591141366E-4 0 2.149344773630842E-9-1.9274339971286913E-9i -6.170810725106048E-10+1.2352730301030493E-8i 1.3884288390192256E-6-1.3941096146796497E-7i 1.662465828524151E-4 -1.5732396975853922E-4 -1.5588957062702697E-6 1.982160074544639E-8-3.3933020898718617E-9i -8.101085478890888E-8-2.516900741571541E-8i 1.3316372704773814E-6-1.5180559951844494E-7i 1.6125810101904348E-4 -1.5700912893355006E-4 0 1.9159372023473155E-9-2.1684358344304863E-9i 6.716307853899255E-9+1.6716537916872023E-8i 1.4345268684238477E-6-1.3868563330528748E-7i 1.6106926694081698E-4 -1.584237129788198E-4 -1.3933211819971987E-6 1.7655155199605764E-8-3.840880135046621E-9i -5.757286563928734E-8-1.4232433453672567E-8i 1.3526424146729273E-6-1.7333649373653393E-7i 1.630476214997682E-4 -1.5638280836870964E-4 0 2.802679942293107E-9-1.6629699353676308E-9i 6.306296341610877E-9+1.8912374902257945E-8i 1.465042097380255E-6-1.1193566375307509E-7i 1.626922272474287E-4 -1.571029176875355E-4 -1.6554160940192916E-6 2.2190954874582818E-8-3.266878043275996E-9i -9.61456652634911E-8-3.196434450024112E-8i 1.378125405277538E-6-1.5374010350248726E-7i 2.2016594573296455E-4 -1.4737850849666967E-4 0 7.211015424870271E-9-1.7302520960665122E-8i -6.833573910478996E-10+7.636198811699443E-10i 8.429301399950966E-7-1.255847050887501E-7i 2.2257576831663853E-4 -1.4735488990033936E-4 0 3.6275045841980217E-9-9.33892005473583E-9i -8.853273130781835E-10+1.2784433938015473E-9i 7.983318136095154E-7-1.4332804751169452E-7i 2.233058931041183E-4 -1.4581023379921538E-4 -2.087921069756833E-6 2.8934363904438672E-8-2.4674513854653843E-9i -1.2181963453925478E-8-8.345603858091082E-10i 7.939529546961214E-7-1.4368479298194642E-7i 2.210002986359709E-4 -1.5419671174710383E-4 0 7.06708012354469E-9-1.353871669969408E-8i -2.0418333147765547E-9+5.511527471268754E-9i 7.756177556536463E-7-1.5012115001111039E-7i 2.1987267601606067E-4 -1.5374291360484765E-4 -1.7622633471428125E-6 2.426659026273722E-8-6.193924137569368E-9i -1.5452597605219434E-8+8.165064085232118E-10i 7.847033256765499E-7-1.417622340978935E-7i 2.2177779069206606E-4 -1.5497527426167E-4 -1.298427638200545E-6 1.4707482346644376E-8-7.569766768007183E-9i -8.902252651623449E-9+3.4898407320210766E-9i 7.623740985824787E-7-1.4964490418216577E-7i 2.2094350311472645E-4 -1.557664782063198E-4 0 4.282296606292896E-9-9.68225...
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This document was uploaded on 01/24/2014.

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