H_75nm_L1_65um_D_4um

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Unformatted text preview: 579302841E-8i 3.1595310729918005E-7+1.0404993742347705E-7i 2.291905922136228E-6-6.388168916065826E-7i 7.64620476142683E-5 4.093976436944679E-5 -3.681945516211695E-6 -2.290995031910586E-7-3.551878809836246E-7i 3.9237848748107984E-8-3.6412415735325725E-8i 5.115985425994127E-6-1.3560858702841527E-6i 7.761402049611969E-5 5.2115755279204736E-5 0 -7.584475270511402E-7-3.5118653652146947E-7i -1.8458784403019687E-8-2.817085702855723E-9i 4.637326927703758E-6-1.3369263265649376E-6i 7.860758322748972E-5 5.325274916673246E-5 -3.998067207926938E-6 -2.673775883575815E-7-3.3996649763979537E-7i 7.499073096669659E-8-2.8112336838304916E-8i 4.570904986785884E-6-1.2728610756826913E-6i 7.529312640550569E-5 5.1312509578274514E-5 -3.3970732320285983E-6 -3.360607681769464E-7-3.6835922324565124E-7i 7.233481385319705E-8-2.666254641725684E-8i 5.029069501768593E-6-1.287574279368269E-6i 9.718060768547115E-5 1.3325576602828972E-4 0 -1.5010211700583971E-7-5.7038241497670176E-8i 3.02104429136439E-7+1.3353220175678936E-7i 2.030680585199335E-6-7.201127565876253E-7i 9.261908589809391E-5 1.3600793140102662E-4 -5.345048475808863E-6 -1.4492435859434965E-8-9.461320287899212E-8i 3.225764862704194E-7+8.706779085577868E-8i 2.2054829688421497E-6-6.861421871060253E-7i 8.926592303576386E-5 1.2660847673881187E-4 0 -2.738064935043757E-7-1.1309259970904075E-7i 2.085365855046227E-7+9.164804393380624E-8i 2.3304434915658037E-6-8.100640485511955E-7i 7.71676310056554E-5 6.402140911649284E-5 -3.845603308163072E-6 -3.373349391455109E-7-3.461268040810449E-7i 1.0292137605701823E-7-2.0522821746370996E-8i 4.4683589746177664E-6-1.2022352875667892E-6i 7.688495802003337E-5 8.950660017090246E-5 0 -7.406582378271967E-7-3.3119752128114925E-7i 4.091985509929643E-8+1.9328887184459746E-8i 3.787925628474698E-6-1.066797358750951E-6i 7.49310071153031E-5 8.872596721759881E-5 -2.1888369288157302E-6 -5.379299529563673E-7-3.334950352784236E-7i 9.031946274374551E-8-9.770510954217081E-10i 4.058039565837531E-6-1.026762428558941E-6i 7.92094537897446E-5 9.06621375070777E-5 0 -6.758795223731894E-7-2.958685768940246E-7i 5.212279002963429E-8+2.486745792507703E-8i 3.5477057395761523E-6-1.0673537541307454E-6i 7.669348753328294E-5 9.076924188518538E-5 -1.8341495384463676E-6 -5.530461128989034E-7-3.1665573864267034E-7i 8.76667505164945E-8+6.731651048620045E-9i 3.811787439754168E-6-1.0336639520112815E-6i 7.933413467531065E-5 8.847628202071343E-5 0 -6.771730420404749E-7-2.9674934160114987E-7i 4.9196344290978254E-8+2.3740740308827075E-8i 3.5862665782218226E-6-1.0827132357300252E-6i 7.806911902142474E-5 8.825870656353951E-5 -1.8461010662073071E-6 -5.408316469485E-7-3.0823285090889083E-7i 8.869564580170068E-8+8.50940361253668E-9i 3.742982760898472E-6-1.0579974457603728E-6i 7.7134002791739E-5 8.684882549132542E-5 0 -7.422665718398174E-7-3.316421059797999E-7i 3.8828745602968925E-8+1.859813104711426E-8i 3.8298987924728835E-6-1.0867661127036282E-6i 7.7439773683715E-5 8.446650244872153E-5 0 -7.417314513432817E-7-3.309831189949863E-7i 3.646506821266179E-8...
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This document was uploaded on 01/24/2014.

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