H_75nm_L1_65um_D_4um

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Unformatted text preview: 2E-5i -2.182682025234183E-6 1.2651810236223504E-7 -1.4261790098027812E-6 8.245642097662948E-5-1.9288050363745742E-5i 2.1221131581996357E-7-4.46578173165027E-8i 2.7077210838133165E-4-6.334416898457803E-5i -3.5281569693934714E-6 1.9960398949120174E-6 -1.6828596704398132E-6 1.4799615461400442E-4-3.4549450994386026E-5i 2.5419036026846676E-6-6.023863864139202E-7i 3.412697962084773E-4-7.975054857439732E-5i -1.8967687458171388E-6 2.347635898719146E-6 -2.0204787547563007E-6 1.0208147249197294E-4-2.385720827754017E-5i 6.3146580826793815E-6-1.475652540775792E-6i 2.4008201063530622E-4-5.619160568986367E-5i -5.605745351126939E-7 -8.441710920659146E-6 -2.1258661785499185E-6 5.46776127731499E-5-1.2800176823786239E-5i -2.0723020212847615E-5+4.8237506768956125E-6i 1.563532592575198E-4-3.669177049109779E-5i 2.5100006013991226E-5 5.550215690573858E-6 -2.27942564380288E-6 2.4349434717474443E-6-5.838035100638182E-7i 4.103754302168772E-7+1.3576508757473456E-8i 2.35563517642382E-5-5.860254682894118E-6i 2.0226666774720597E-5 1.0016647817077441E-5 -2.02707805364717E-6 2.95754939573298E-6-7.066344914300062E-7i 6.922874428972708E-7+3.7293004792077466E-8i 2.8908789746634047E-5-6.907339583385415E-6i 6.182649387025512E-5 -7.710036814988635E-5 -3.964379239760787E-6 2.304432467151456E-7-1.3620799439384973E-7i -1.6522818112172935E-7+4.128367235763932E-8i 5.477541082910673E-6-1.2198826542835101E-6i 6.09910269101242E-5 -8.64144884794454E-5 -3.3363301707697815E-6 1.7599550115353242E-7-1.0311502588912734E-7i -1.377419797973182E-7+3.460640981689291E-8i 5.161836956123515E-6-1.1557532748582954E-6i -1.5144526592714837E-5 8.041845505614435E-6 0 2.9108007539621616E-4-6.711712056963792E-5i 0.0036482178716566406-8.550557804838786E-4i -2.9824992051053753E-4+7.24023499608029E-5i -6.3885731693277896E-6 1.0931365672381827E-5 0 -1.3956889844210413E-6+2.623136736660792E-7i -1.470619734864124E-5+3.0500049691626512E-6i 4.1883070131343417E-4-9.740906069033313E-5i -6.407850592352752E-6 1.0023270746510381E-5 -5.865912550301113E-7 1.025940284721879E-4-2.3864104110971713E-5i 1.8221952154323377E-4-4.145777359615122E-5i 4.666652338763796E-4-1.0870224338713708E-4i -5.410397357749139E-6 1.1141691657584038E-5 0 -4.5733200900362664E-7+2.6241245460143874E-8i -1.6667152851363813E-6+1.7416382105719017E-7i 3.1897082080355866E-4-7.44163150348699E-5i -5.3904256722051514E-6 1.0400665982076934E-5 -6.929506550151125E-7 6.834561313905641E-5-1.585370280824822E-5i 7.796335091331394E-5-1.7846683991374673E-5i 3.487656148919625E-4-8.119050642418419E-5i -1.007773031577754E-5 6.536344926943854E-6 -1.232910156249995E-6 0.0012907976851176822-3.023183885691318E-4i 8.8389206031354E-4-2.0686920117634909E-4i -2.700091431112655E-4+6.429910747510382E-5i -1.046151762205473E-5 9.074215636263997E-6 0 4.378243760574429E-4-1.0277081394337885E-4i 0.0017529538097640648-4.0949523224886284E-4i 6.796637050654606E-4-1.6157610707443862E-4i -1.0019966550210464E-5 8.161041997198493E-6 -7.634639739990237E-7 7.662691905812495E-4-1.7984220954970145E-4i 0.0011596945672...
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This document was uploaded on 01/24/2014.

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