H_75nm_L1_65um_D_4um

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Unformatted text preview: 79E-4 7.500000000000001E-8 6.268443236801989E-6-9.267874360982279E-7i -2.0431064102362355E-6+3.753670211931686E-7i 1.7759543305212045E-5-4.813147623168535E-6i -2.19231449223805E-4 1.4877198942292214E-4 1.9048546289503103E-6 3.180726600602625E-6-5.939915969895362E-7i -1.6422257471144543E-6+3.886456556168559E-7i 1.8050628139193883E-5-4.586865244463057E-6i -2.1794846107557207E-4 1.4513398958054601E-4 1.8339197103323434E-6 6.771123016643714E-6-1.262842741646504E-6i -2.3850708834904306E-6+5.673275851938089E-7i 2.008648465486214E-5-5.230610550911142E-6i -2.1709735762031097E-4 1.4394318709725016E-4 7.500000000000001E-8 1.130805620749506E-5-1.9511072615018E-6i -1.8517243048632448E-6+4.0657996547288633E-7i 2.0702930765476936E-5-5.63477778107069E-6i -2.2015471500195992E-4 1.46320287272939E-4 1.681674949173736E-6 2.6341419276232562E-6-5.373955424633396E-7i -1.2525329150514947E-6+3.1691835407888526E-7i 1.9222300157838583E-5-4.869020154063541E-6i -2.202993300176649E-4 1.4048435326774445E-4 1.7763605101780463E-6 4.128139717562782E-6-8.721220637455951E-7i -1.4909688220444046E-6+3.871021716927066E-7i 2.3179619921638728E-5-5.869203785152467E-6i -2.177899519227615E-4 1.4244000218352937E-4 2.0757116917538712E-6 8.295696991689491E-6-1.631691690951741E-6i -2.7011596136938326E-6+6.682596338853712E-7i 2.165040377332335E-5-5.650080207299037E-6i -2.2031498291551E-4 1.4354995795103477E-4 1.7805657814373003E-6 3.1913920957131326E-6-6.664971785622433E-7i -1.379259994344767E-6+3.542766630846665E-7i 2.079770474181228E-5-5.27777246419322E-6i -2.2273754549692658E-4 1.4222508075308613E-4 0 -2.2846647925061338E-7+1.9654381046819456E-8i 4.930708164916743E-8+4.349097301509978E-9i 1.9594089043000453E-5-5.030075145902206E-6i -2.2295779063709835E-4 1.4489828113177475E-4 0 -1.7700048520440104E-7+7.826608033542626E-9i 4.6487175687885685E-8+6.050915889293147E-9i 1.7910572046775973E-5-4.610269737602838E-6i -2.2263288624627814E-4 1.461334887742886E-4 1.7754435903988726E-6 1.3744094440476578E-6-3.2081920466450355E-7i -9.135966482442213E-7+2.457901355253684E-7i 1.7206685783445457E-5-4.439141371046001E-6i -2.1005209707257585E-4 1.4523157559752738E-4 7.500000000000001E-8 8.872556405947982E-6-1.9513366146436026E-6i -8.402482925855501E-6+1.8836089799243356E-6i 1.6313755658701863E-5-5.073147670430391E-6i -2.1066527424552117E-4 1.4996913546415385E-4 4.6640870861458336E-6 5.070784876157274E-6-1.178516310490909E-6i -7.159257012852141E-6+1.6368290183955777E-6i 1.6073124298468975E-5-4.496032660472951E-6i -2.154642116428136E-4 1.4946043439880647E-4 2.242110965521491E-6 4.914253741326657E-6-9.548258137726212E-7i -4.0368304201845954E-6+8.617130729632363E-7i 1.6726157951025742E-5-4.5861967238756875E-6i -2.1899999999999996E-4 1.309817780073372E-4 7.500000000000001E-8 6.805920101200192E-6-1.323802492880082E-6i -5.060720867046051E-7+1.2277982807869336E-7i 4.786471889671709E-5-1.134763387195209E-5i -2.0362620069101856E-4 1.5499999999999995E-4 0 -2.820468282348069E-7+7.957042929564694E-8i -2.3464870125869136E-6+9.14...
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This document was uploaded on 01/24/2014.

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