H_75nm_L1_65um_D_4um

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Unformatted text preview: 44192876E-7i 1.0033882611565356E-4 2.5729611845545554E-6 -1.7925989888500201E-6 9.823626392830938E-8-3.397106113222813E-8i -7.994900058250768E-8-4.458267048214252E-8i 4.253083482101235E-6-7.622546067699519E-7i 1.0093606533446615E-4 3.0835743065137197E-6 0 6.7124484936010985E-9-6.221807086554681E-10i 1.212445087545326E-8+9.830206617235715E-9i 4.292675499210634E-6-7.155714289016045E-7i 1.0159768729518952E-4 3.99717639891227E-6 -1.8050422109451078E-6 9.359860346160096E-8-3.373759955263017E-8i -1.8071779804837312E-7-1.0209905033594681E-7i 4.232580513226051E-6-7.221233329834562E-7i 1.0027954839699166E-4 1.118154180579313E-6 0 4.755867311738799E-9-2.6168102453423625E-9i -4.811434773160219E-9-2.1806059021252486E-9i 4.255022488616238E-6-7.632500698311502E-7i 9.886899752444621E-5 1.4071872347697794E-7 -2.2122871662926658E-6 1.255893842291583E-7-4.289783902925551E-8i -5.233442580407603E-9-1.859766265793545E-9i 4.28641297043843E-6-8.112445103242056E-7i 1.0259876347213441E-4 1.4562893002739708E-6 0 4.536016303055142E-9-2.5830921057827037E-9i 1.212617141919511E-9+9.740477419597634E-10i 4.14692233519875E-6-7.175816108204902E-7i 1.0240170392212221E-4 -5.38240548128713E-8 -2.535825599746073E-6 1.3355270616824268E-7-4.40135593578211E-8i 1.9520419818428753E-10+1.278634993817305E-9i 4.091282313507562E-6-7.545988117158428E-7i 9.691760267977721E-5 -1.2849181778082223E-6 0 5.653063462652193E-9-2.449270254688238E-9i -8.277897306619887E-10+1.8555836619934533E-9i 4.442443381368353E-6-8.228085828986879E-7i 9.485366859976714E-5 -1.6933511706635174E-6 -1.6333461583414483E-6 1.0040822603029742E-7-3.700544836961464E-8i 3.826365016393156E-8+2.418229705747701E-8i 4.543208886098763E-6-8.743344274288196E-7i 9.718993776927775E-5 -1.8743280931298814E-6 -2.717795757870396E-6 1.5709248464027583E-7-5.4929600691419285E-8i 6.222440736987944E-8+3.6213767931422804E-8i 4.374175218449961E-6-8.454745092333562E-7i 9.941095256979934E-5 -1.0998968390056043E-6 0 4.2655450898252604E-9-2.4633004049163084E-9i -6.649236708628421E-9-1.6072630774043029E-9i 4.305302077420373E-6-7.764998233268549E-7i 1.0078434569022005E-4 -2.0690417200598185E-6 -1.3825766206058083E-6 7.654984848339444E-8-2.6413191154033098E-8i 4.815228006647942E-8+2.9096569623762005E-8i 4.231328373897899E-6-7.536662003967198E-7i 9.872004629853195E-5 -2.9904709859293176E-6 0 4.0485060659532345E-9-2.7125185963702533E-9i -1.9204724471890046E-8-9.718471453241476E-9i 4.424495035211086E-6-7.410659239269409E-7i 9.949661649562415E-5 -3.0250880547179016E-6 -2.3931330763610547E-6 1.3172277716263528E-7-4.5809323097125493E-8i 1.1319114815394986E-7+6.452947621640384E-8i 4.276392855204797E-6-7.89711494608971E-7i 1.017526196611484E-4 -4.422969073006794E-6 -2.138356582775992E-6 1.1082832343140171E-7-3.972191019599398E-8i 2.233157409270843E-7+1.219085992192943E-7i 4.196716551886448E-6-7.385755198660631E-7i 1.0226195537377742E-4 -3.5942259088085258E-6 0 6.167927944976876E-9-7.648472376984873E-10i 3.2818422088781868E-9+7.627837312956451E-9i 4.29214170510083E-6-6.495520796917818E-7i 1.0212773...
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This document was uploaded on 01/24/2014.

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