H_75nm_L1_65um_D_4um

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Unformatted text preview: 154485E-6i -6.52462613638024E-5 9.990206709971242E-5 0 5.263713605714593E-7-1.36454600496716E-7i 5.4051333586713215E-8-3.71606099974775E-8i 5.589269690129406E-5-1.4704097339057753E-5i -6.612833132793612E-5 9.945948866082576E-5 2.620532590269133E-6 -1.3664313925173855E-5+3.463871080077764E-6i -3.2564837256257932E-6+8.470236600102941E-7i 5.653097717229031E-5-1.4924396786711545E-5i -6.226285936161747E-5 9.88948416240464E-5 0 8.143433945093787E-7-2.0865814352871715E-7i 4.395983954335464E-8-3.4060857541200194E-8i 4.67695010774519E-5-1.2356262877636834E-5i -6.310389280611145E-5 9.63394285775837E-5 0 1.5346242732833248E-7-4.568817738274349E-8i 8.026349318859816E-8-4.2582456018137275E-8i 5.189168969081571E-5-1.3704545422763797E-5i -6.179894667230497E-5 9.814542744407692E-5 3.6014335571499532E-6 -8.435823451621587E-6+2.213939107922668E-6i -3.2858964667133075E-6+8.489525617859917E-7i 4.410499317700354E-5-1.1684666849675052E-5i -6.50618119419829E-5 1.050835209309471E-4 0 3.0628730659371106E-7-8.033077414093537E-8i 6.234812117977828E-10-2.3140926519449322E-8i 4.960986837685504E-5-1.3025454155467026E-5i -6.379377995446851E-5 1.0325803454766431E-4 3.228424763038993E-6 -8.959662846290934E-6+2.3102337786604513E-6i -2.994536584899238E-6+7.804960049782221E-7i 4.4442364243855705E-5-1.1759064419951887E-5i -6.515496265313668E-5 1.0265509085967306E-4 0 6.153566700044839E-7-1.542445671266966E-7i 8.260374627168585E-8-4.363793251352785E-8i 5.19549497613062E-5-1.366908915605742E-5i -6.302759726625409E-5 1.0136064646250186E-4 0 4.549872129358787E-7-1.1878011395925127E-7i 8.765147881054848E-8-4.444895473531097E-8i 4.674398926395258E-5-1.2334308560875395E-5i -6.014132717231748E-5 1.1226632060309843E-4 0 1.2001133926744026E-7-3.1462136232916774E-8i -1.2337000681282572E-8-1.6422509981767196E-8i 3.220537907975954E-5-8.496864901765152E-6i -5.84761468544072E-5 1.227464953895497E-4 0 -2.3142490415337114E-9-3.701069164682713E-10i 3.315718003112089E-8-2.576907951317801E-8i 2.412188745437849E-5-6.354899668330006E-6i -5.794597455654054E-5 1.2124199697112909E-4 6.56414889727293E-6 -5.188881954238595E-6+1.3526179897687374E-6i -3.2139796659461628E-6+8.396809706600104E-7i 2.2815467610617383E-5-6.040460550431634E-6i 6.261534364427609E-5 1.9999999999999998E-4 -9.79034387475206E-5 1.0666858174535758E-6-2.8456851236934487E-7i 1.0874914405766001E-6-2.734762773299653E-7i 9.92282863876751E-7-2.5813969978277134E-7i 5.9655619911384416E-5 2.2786905044045038E-4 -1.0129242873390395E-4 8.014422309190943E-7-2.1372225680349237E-7i 9.335814897958869E-7-2.371941624550499E-7i 8.531235709596747E-7-2.2139870788790237E-7i 4.6684363629895335E-5 2.0E-4 -8.056188652367739E-5 1.0865222524403527E-6-2.913096515400113E-7i 1.1944383228991763E-6-3.0269895969574996E-7i 1.3413746425581156E-6-3.4720434522331714E-7i 5.649845757505471E-5 2.0E-4 -3.894543020869335E-5 5.916760359264808E-7-1.6076003138626796E-7i 6.293315417724472E-7-1.57023525302992E-7i 1.8337323533039316E-6-4.693379868873294E-7i 6.246352745836479E-5 2.30077775...
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This document was uploaded on 01/24/2014.

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