H_75nm_L1_65um_D_4um

512703326874434e 48726771548195273e 5i

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Unformatted text preview: 8-1.5313078532389517E-8i 1.1288977145545258E-8-3.0100835458749106E-9i 1.6634365330508428E-7-4.277178121125849E-8i -7.217705344427851E-4 -1.8561468166337843E-4 6.401941550169591E-5 5.167895904865906E-8-1.3613902705302518E-8i 1.5632416582114887E-8-4.185042747913417E-9i 1.6504110386874254E-7-4.246488926050331E-8i -6.788651274059398E-4 -1.6453618076208088E-4 3.268929567149783E-5 3.789448993096035E-8-1.0097674285940988E-8i 1.2197496014712101E-8-3.3152873565642034E-9i 2.18274792861379E-7-5.625536148649862E-8i -7.336273205105984E-4 0 -1.4592788916330973E-4 -1.217342890678185E-7+3.140045682491638E-8i -2.753394798814875E-10+6.944210876371593E-11i 1.4327697416596264E-7-3.684560736444499E-8i -7.157912121794917E-4 0 -2.1713346152179143E-4 -1.6699733771838378E-7+4.3164258542922634E-8i 3.3653654229113887E-10-8.881595979074027E-11i 1.0503460446408097E-7-2.6917274102716096E-8i -6.809963617854295E-4 9.180816322524289E-6 -1.79733343118227E-4 -1.9133170587025629E-7+4.944522762667957E-8i 2.157360337889562E-9-5.574525033734377E-10i 1.4833221769519432E-7-3.812561377082173E-8i -7.244034254182461E-4 5.861364862601167E-5 -1.7694099987582742E-4 -1.3829326452837726E-7+3.5710717600687464E-8i 1.3292364632140203E-8-3.4295514107735246E-9i 1.2598479693561597E-7-3.2360642630369774E-8i -7.381625082272947E-4 5.174902485113127E-5 -1.0928014400862509E-4 -8.778424805872035E-8+2.258411486125637E-8i 7.2004997760777775E-9-1.8476144493513088E-9i 1.5501881119855487E-7-3.989169711671297E-8i -7.032416361588508E-4 6.137448225493133E-5 -2.473628389644681E-4 -1.8257437342006416E-7+4.72170452170558E-8i 1.9656882690037754E-8-5.086986076697071E-9i 8.467674841201342E-8-2.1631164375849254E-8i -6.334601954104367E-4 -1.873315294059767E-4 9.178831202273116E-5 1.2519895514603383E-7-3.281356287145862E-8i 4.771983141672688E-8-1.261673581422569E-8i 2.3020694140551487E-7-5.9283446881232053E-8i -6.06278819170812E-4 -5.499589018570668E-5 2.1827695595605539E-4 3.299334188647604E-7-8.598184943212399E-8i 3.877452580209427E-8-1.014771122099756E-8i 1.2372923992965328E-7-3.1323516488921315E-8i -7.336273205105984E-4 0 1.4592788916330973E-4 1.2166685435852562E-7-3.1804378424182373E-8i 4.1893665987406957E-10-1.1116242823880466E-10i 1.4288510028806343E-7-3.6608049293885074E-8i -6.754119082950707E-4 1.702580766638902E-5 1.1188473022743919E-4 1.463090551005947E-7-3.830657486881529E-8i -4.793608748319351E-9+1.260154858463315E-9i 2.1244768116584945E-7-5.4590886499370126E-8i -7.443979541727428E-4 0 7.331910444096519E-5 6.403758102936689E-8-1.6856610239707986E-8i 2.7754211840204007E-10-7.444957749272367E-11i 1.6853586699351145E-7-4.331948051894068E-8i -7.448570235036996E-4 -4.6197063493054556E-5 5.0575150635739684E-5 4.3430217642518164E-8-1.1503114696245979E-8i 2.4334069411258948E-9-6.654350931941843E-10i 1.715390251009155E-7-4.4116270265021094E-8i -7.381625082272947E-4 5.174902485113127E-5 1.0928014400862509E-4 9.226868610236767E-8-2.4180757168547088E-8i -8.706403017565263E-9+2.298681157798579E-9i 1.5663323386725734E-7-4.02087...
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