H_75nm_L1_65um_D_4um

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Unformatted text preview: 31791548446E-6-4.629774286206177E-7i 9.317146975398601E-5 1.6862266277775035E-4 0 2.842028506945916E-9-2.9692852942822786E-9i 5.931162644514704E-9-4.6549126778528856E-9i 1.9791782421795855E-6-4.4642995503207846E-7i 1.7838997419586063E-4 1.844911730404703E-4 0 1.540672509501923E-9-1.550960059137481E-9i 1.875864994801394E-9-2.698676696829135E-9i 9.057706964772976E-7-2.041939932560381E-7i 1.9437629296696225E-4 1.8485473354307806E-4 0 1.7220400925909474E-9-1.6807084883443783E-9i 1.6457513769075797E-9-2.6289262862403307E-9i 8.024669616015739E-7-1.8262502952068863E-7i 1.8380909860427066E-4 1.8083575289368944E-4 7.891097198082575E-6 -5.177572846811525E-8+9.085210371946031E-9i -3.989830578112396E-8-1.6310567669435613E-9i 8.850677890874577E-7-1.9803050072659492E-7i 1.4616922036097098E-4 1.849090871274038E-4 0 3.572184958282928E-9-1.8509234018517992E-9i 5.964130516539212E-9-2.0488132874063244E-9i 1.152522879790695E-6-2.6124767395743296E-7i 1.5452204499323717E-4 1.7069314879536947E-4 6.5035775685800615E-6 -5.840517643527044E-8+1.1438323822822484E-8i -6.453619050636071E-8-9.867793933866713E-9i 1.1917486389501308E-6-2.465847425973691E-7i 1.6042117565933536E-4 1.8077271052397337E-4 4.8917133017760185E-6 -3.743604782458942E-8+7.259592345302226E-9i -3.20631733630149E-8-2.0643467233694823E-9i 1.0605383005706165E-6-2.3505120803628945E-7i 1.6622373120109453E-4 1.8422991020921738E-4 0 1.4335175254205933E-9-1.5229517117805313E-9i 1.8468168262142307E-9-2.953344074625449E-9i 9.945154356220436E-7-2.2347568652962507E-7i 1.5643386593925215E-4 1.8815314767064656E-4 0 1.996788235735132E-9-1.431440154321499E-9i 2.4365242996815527E-9-2.880251548723067E-9i 1.0435656837069493E-6-2.3942102444900557E-7i 1.9418510256247456E-4 1.9999999999999998E-4 -5.2556643568179356E-5 2.555031697861187E-7-6.209399912535869E-8i 1.6922750924209263E-7-3.270398007253947E-8i 6.647417199140145E-7-1.6672684891473273E-7i 2.2110559774894402E-4 1.9999999999999998E-4 -4.716637674041974E-5 1.8799704481416821E-7-4.468624771548826E-8i 1.1322869394841288E-7-2.218214633599687E-8i 5.714361601642019E-7-1.4195116784205077E-7i 2.1585220927649486E-4 2.1555996261383357E-4 -4.253723672109396E-5 1.6036171350659046E-7-3.9108916316368555E-8i 1.0492284115944567E-7-2.1874269321668452E-8i 5.651758085643266E-7-1.405212378440922E-7i 2.0913063833300134E-4 1.9999999999999996E-4 -3.1593036882800715E-5 1.4194808591113194E-7-3.3509429761619535E-8i 9.069886300824984E-8-1.6455615266982107E-8i 6.460337605692936E-7-1.5735298181911077E-7i 3.194379823100309E-4 2.4460785572017314E-4 -7.244838180764283E-5 1.0716579980447265E-7-2.692527619760275E-8i 5.852167496589279E-8-1.4093183743603454E-8i 2.698036319444625E-7-6.857867805633224E-8i 2.806137967102745E-4 2.0E-4 -7.113332673397832E-5 1.7083687530417422E-7-4.1589869919298276E-8i 8.458664037716756E-8-1.9010752150127492E-8i 3.7218008110036146E-7-9.393780427201968E-8i 2.742568831185291E-4 2.4046176723656928E-4 -7.123998475481406E-5 1.436824504486666E-7-3.596399589407292E-8i 8.691665435188186E-8-2.04818812848...
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This document was uploaded on 01/24/2014.

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