H_75nm_L1_65um_D_4um

542202713476526e 5 17738997642256782e 5i

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Unformatted text preview: 95397843E-4i 6.483395697242205E-5-1.523258473735134E-5i 1.3950345257233155E-4-3.1451996184928E-5i -1.0303638699865502E-5 4.139462409982694E-7 -1.015007505806032E-6 0.00269707406304766-6.299634111548082E-4i -6.991756492123683E-5+1.6434988230088184E-5i 1.5300142550436467E-4-3.479026508336133E-5i -1.0746047886708926E-5 3.853750438035191E-8 0 0.003839157521415895-9.002194161619426E-4i -2.5875795875230827E-5+6.150426492659204E-6i -1.4602451213113855E-4+3.6852546406766606E-5i -1.0980682732695252E-5 -9.011064906797255E-7 0 0.0037337557145974733-8.749118520500384E-4i 2.427209906782282E-4-5.7336938955531804E-5i -4.858185954219989E-4+1.1802007640628699E-4i -1.037070998486507E-5 1.8143720315175384E-6 -8.63985539853918E-7 0.0027678788650641116-6.469315401125822E-4i -2.5472313047344926E-4+6.0064982342558866E-5i -1.1162956590100613E-4+2.7584982787146283E-5i -1.3961678738091033E-5 8.746178219101379E-7 0 0.001331104333848285-2.9587728071276114E-4i -1.3125676918848694E-4+2.927310400811095E-5i -0.005025793197405039+0.0011532385549102644i -1.3251314388434386E-5 1.229340630217173E-6 0 0.003308445230550424-7.52403336967751E-4i -3.3947245463123956E-4+7.716960960967343E-5i -0.0031087108901782555+7.308241342724715E-4i -1.3920298707146355E-5 1.4872389161552565E-6 -5.973841862707777E-7 0.001390028121154329-3.158611017304394E-4i -8.444517157729474E-5+1.879890129571699E-5i -0.0033585622808764174+7.7620437130443E-4i -1.108141499109531E-5 1.2215289318577082E-6 0 0.0036986835630752734-8.66310538572822E-4i -2.994916811144334E-4+7.071245370661531E-5i -6.511482749269754E-4+1.5792879519347115E-4i -1.1562807970021247E-5 2.368430472703436E-6 0 0.003624554481250799-8.444637662087557E-4i -4.147153679880403E-4+9.723929644742391E-5i -0.00140914602149749+3.381896988578992E-4i -1.2873908988342889E-5 1.6691720766006298E-6 -5.955611626650372E-7 0.0026582285056257786-6.105430948868187E-4i -2.3030893913376864E-4+5.262944669004076E-5i -0.002458468705673477+5.767746378924052E-4i -1.213808263111741E-5 -1.1031790562523956E-7 0 0.003485326891012085-8.097889994273819E-4i 4.198525495174529E-5-9.789012284168322E-6i -0.0015527639949887572+3.7223899360818975E-4i -1.3406473206486328E-5 -3.5971050672222933E-7 0 0.0031327950313125227-7.115307917789168E-4i 9.348081937956015E-5-2.113596896694606E-5i -0.003208248295373732+7.521777751216721E-4i -1.3227692183756937E-5 4.7288709650663407E-7 0 0.0033253390114803692-7.576073657894004E-4i -1.548429748229052E-4+3.521202604563414E-5i -0.0028571816740250527+6.737945402697983E-4i -1.2589159572402375E-5 4.6477454152910766E-7 -6.100064477156278E-7 0.002747223225341118-6.344424917128055E-4i -7.124477261572769E-5+1.647303665573783E-5i -0.001952059977465248+4.6017545385078904E-4i -1.2441239835107728E-5 1.1178772440186084E-6 0 0.0034177766690756165-7.903948197852034E-4i -2.792813390506799E-4+6.486191806689411E-5i -0.0019575313702691124+4.6747412385115747E-4i -6.5056329267698185E-6 9.381087505064778E-7 -1.0909924614805782E-6 3.622522719695468E-4-8.450279757145338E-5i -1.584365237990026E-5+3.6945...
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This document was uploaded on 01/24/2014.

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