H_75nm_L1_65um_D_4um

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Unformatted text preview: 0842E-7i 2.329542098244791E-4 1.9999999999999998E-4 -2.3733504508629187E-5 8.97544044834273E-8-2.1200660614351428E-8i 5.289195232421188E-8-1.046959087294339E-8i 5.593848403236051E-7-1.3614776230210644E-7i 2.3560508999712513E-4 1.8789634274776298E-4 -1.557605453167021E-5 6.399829040225332E-8-1.4704937101057105E-8i 3.59747480894236E-8-6.741135014810145E-9i 5.825978613121097E-7-1.3933569070057045E-7i 2.2416282866836944E-4 1.7979368990830478E-4 -3.2854931814538975E-5 1.529873337892539E-7-3.299828391691817E-8i 8.60972107367692E-8-1.3294160968425103E-8i 6.274546098110448E-7-1.5176792497437972E-7i 1.800915405997225E-4 1.6777343192870908E-4 0 2.1058898990489847E-9-1.809226263072555E-9i 2.4755431413729253E-9-3.9404342902403635E-9i 1.0068266471341997E-6-1.953805757366637E-7i 1.8304503108195006E-4 1.658741104819464E-4 -6.815587034566126E-6 5.858913492537876E-8-9.621010720000574E-9i 6.476036805595546E-8+7.287393952730418E-9i 9.835655603350672E-7-1.9402134349768576E-7i 1.851391027251694E-4 1.721231055678548E-4 -6.276551000668776E-6 4.854930306879166E-8-9.687874518321685E-9i 4.361409954560525E-8-1.211435151441062E-10i 9.258954801818895E-7-1.9476556584537014E-7i 1.857913133943023E-4 1.7321222731314E-4 0 1.895563041384371E-9-1.8146853003204084E-9i 1.9775767347710874E-9-3.443963997761596E-9i 9.18761126685019E-7-1.9360953057382913E-7i 1.7694200617591612E-4 1.7224805124392393E-4 0 2.101704033332699E-9-1.6438227790253308E-9i 2.6883021965512113E-9-3.2677364976168015E-9i 9.949083014984121E-7-2.0451266572142678E-7i 1.7022146786707236E-4 1.7127335758781212E-4 -5.44198139914063E-6 4.739149797597837E-8-1.0377859320694866E-8i 4.8478096628231886E-8+1.0724547237204004E-9i 1.0507108019795748E-6-2.1580399757695666E-7i 1.623205100492157E-4 1.7465124003046778E-4 -6.9630699645333895E-6 6.081466544158471E-8-1.421271457252224E-8i 5.841566192792755E-8-1.0600222868822643E-9i 1.0868326358939493E-6-2.317944986298212E-7i 1.6793655316988087E-4 1.7482943178479302E-4 0 1.901512310275843E-9-1.7595313899825573E-9i 1.566434161919786E-9-3.6841533712503793E-9i 1.0466387265676837E-6-2.2034978743725448E-7i 1.7008231801880037E-4 1.7623592081776103E-4 -7.3432790741564645E-6 5.950196117444559E-8-1.3472070523778057E-8i 5.3563755118894673E-8-1.8709389526787994E-9i 1.0122823225125516E-6-2.183398506726698E-7i 3.0E-4 1.5715165323230949E-4 -2.5797059818327894E-5 6.955364304701905E-8-1.629816307687522E-8i 2.606431939305687E-8-5.631021055138445E-9i 4.1220509189972903E-7-1.0084691674734883E-7i 2.800131496826554E-4 1.3856859349871523E-4 -1.76878378034944E-5 6.32124501922851E-8-1.381531542339593E-8i 2.1980843217168266E-8-4.325516603122954E-9i 4.964949011618606E-7-1.1837803674618854E-7i 2.455263320411107E-4 1.2458696301289294E-4 0 4.84901552224157E-10-3.082626837946789E-9i 8.732654197298162E-11-6.123379951846381E-10i 6.843618155266195E-7-1.4574804955279939E-7i 2.4806352237082224E-4 1.2864024580853484E-4 -6.1556612087704934E-6 3.702175353976911E-8-6.225261284422501E-9i 1.2881795520149609E-8-1.7256641648248872E-9i 6.59492...
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This document was uploaded on 01/24/2014.

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