H_75nm_L1_65um_D_4um

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Unformatted text preview: 48266687977E-8i 8.96159218094966E-7-9.502145198784194E-8i 2.122803221547302E-4 -1.5499999999999992E-4 7.5E-8 2.8321692501957927E-9-2.265110934039495E-9i -3.0235655607296226E-8+8.008175440043825E-8i 9.201379880305687E-7-1.2112313713132638E-7i 2.1326395171595376E-4 -1.5612450103595464E-4 0 4.219986201097003E-9-2.0130353659075166E-9i 6.493267037866518E-9-1.6378854093796224E-8i 8.450540978923218E-7-1.4082661905451283E-7i 2.1398229352952513E-4 -1.5499999999999995E-4 0 4.648377511471919E-10+1.3348391808879655E-9i 5.305249927610323E-8+8.085591239314197E-8i 8.620068518837721E-7-1.0014019346334026E-7i 2.1400370808528395E-4 -1.5499999999999995E-4 7.500000000000001E-8 -3.1639232074301012E-9-1.5559662896503807E-9i -2.7721164941073566E-8+7.089550608035022E-8i 8.81610205491173E-7-1.3605221158667146E-7i 2.165863007246951E-4 -1.5362698890464634E-4 7.500000000000001E-8 -2.1037918900880526E-8-1.2012634759602422E-8i 4.933551942439459E-8+1.8680208892461286E-8i 8.306173219313778E-7-1.7520628099031706E-7i 2.159796150471952E-4 -1.550551455174269E-4 1.0220689725209304E-6 -1.3883314950917776E-8-6.9804083824714975E-9i 1.2606120054962854E-8+3.1370405792920964E-8i 8.332895484207186E-7-1.601719743529541E-7i 2.1468890532029696E-4 -1.5310756031914618E-4 7.500000000000002E-8 -2.6161383170137448E-8-1.4118353871797298E-8i 7.746075594222073E-8+3.1889134925281816E-8i 8.326532046296303E-7-1.7422586970960854E-7i 2.1787645881682507E-4 -1.5507544681288648E-4 8.238040331157703E-7 -9.909038164112281E-9-8.407886544255458E-9i -3.011800575809017E-9+2.9040089905286337E-8i 8.141255028474315E-7-1.6719966268358548E-7i 2.1796633464841192E-4 -1.5384571077413524E-4 7.500000000000002E-8 -1.9582990217521205E-8-1.1596639912236917E-8i 3.306950674210528E-8+1.914284544371877E-10i 8.26574097355446E-7-1.7791438176468183E-7i 2.1899999999999996E-4 -1.5499999999999997E-4 7.500000000000001E-8 2.714537928269796E-8-4.319848369061055E-8i -3.75826632792958E-8+5.3219295346647486E-8i 8.023715406029865E-7-1.6967445438201132E-7i 2.1899999999999993E-4 -1.5344831327317315E-4 7.499999999999998E-8 3.732802504377439E-8-6.227054828050328E-8i 4.575520065839648E-9+1.9528974841574884E-9i 8.223491401312101E-7-1.6455509001161366E-7i 2.1833269959367895E-4 -1.5629781310161985E-4 0 3.848081107538909E-9-7.761922509958866E-9i 2.277700038024564E-9-7.9852110188629E-9i 7.877509936317315E-7-1.49912307310024E-7i 2.1899999999999996E-4 -1.5499999999999997E-4 0 9.538780979072354E-10-5.730171124263383E-8i 8.118249965830114E-9+6.884458060989087E-8i 7.703717952643544E-7-1.3389718258752637E-7i 2.16653086760941E-4 -1.5699904167574085E-4 0 3.3330987180349436E-9-4.67039328565233E-9i -1.1744625214490008E-9+3.9804971356064795E-9i 7.981766068808408E-7-1.5156310668579576E-7i 2.195661494499803E-4 -1.5523187629311403E-4 9.475407253612575E-7 -3.182978687045479E-9-1.5645646171528506E-8i 1.2117014397668787E-9+1.4213250703340799E-8i 7.840685882432507E-7-1.5649362763514932E-7i 1.8631815436002223E-4 -1.549999999999999E-4 0 2.301410637582657E-9+1.8635129580939213E-10i 4.24...
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This document was uploaded on 01/24/2014.

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