H_75nm_L1_65um_D_4um

5508517610576342e 4 16453918016034957e 6

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Unformatted text preview: 05444059777423E-8+2.4978708788586517E-8i -1.2009766207001248E-8+2.881109072187265E-9i 1.2376061728031632E-4 6.826188845968202E-4 2.796761841884073E-4 -2.9760484552927532E-8+7.978266963605121E-9i -7.791059700433508E-8+2.009635282409327E-8i 5.1021912945391105E-8-1.3362003529629616E-8i 1.2659959106363315E-4 6.507747469475547E-4 3.463650852465746E-4 -3.71614738218053E-8+9.937368069798085E-9i -9.104701170620442E-8+2.3486487592827E-8i 3.3670643771057E-8-8.87730396224981E-9i 6.220574324233334E-5 6.749025109335371E-4 3.1645070112621895E-4 -2.8352947844321438E-8+7.6697094149102E-9i -9.377618733338621E-8+2.4252951549333086E-8i 4.262187155130204E-8-1.1167098127476627E-8i 7.083242440532495E-5 6.451816901721272E-4 2.7593065204846993E-4 -3.3146399527629716E-8+8.943192403069971E-9i -1.0283337600409357E-7+2.657649336673289E-8i 5.7579937850956225E-8-1.5069075489256357E-8i 0 6.910585191642814E-4 2.8625534561362004E-4 -1.899385431432746E-8+5.241321379879282E-9i -9.422187736812405E-8+2.4430870027865154E-8i 5.1619316242036954E-8-1.3474159244722138E-8i 1.3880300031385564E-4 5.883527511069954E-4 3.272152763176429E-4 -5.347828107720123E-8+1.4236767998252497E-8i -1.1334709514955067E-7+2.9198407542634626E-8i 3.934617571899807E-8-1.0396652367263572E-8i 1.862020760316348E-4 6.556451058484862E-4 3.08159507493176E-4 -3.806254901391251E-8+1.0110967392788332E-8i -7.689905293391818E-8+1.978207553313939E-8i 4.291450471352969E-8-1.12851537908891E-8i 1.2709600379896702E-4 6.123254304277295E-4 4.103756487290988E-4 -4.384495972688387E-8+1.1707379789211557E-8i -1.0135217981037406E-7+2.6150161864150432E-8i 1.3795058592133043E-8-3.735172844217499E-9i 6.380034299364398E-5 6.390424600502389E-4 3.834817472668445E-4 -3.372797047913747E-8+9.105142144506266E-9i -1.0646332034061811E-7+2.753800400679491E-8i 2.0198250797610732E-8-5.353109238620468E-9i 0 6.596725811512602E-4 3.5261322337796277E-4 -2.298822715328673E-8+6.322756566891535E-9i -1.1006106574587489E-7+2.8533610659507192E-8i 3.037705714302932E-8-7.95472773841609E-9i 8.836821564939906E-5 5.77319499943084E-4 3.934711243286226E-4 -5.014077035700495E-8+1.3434469535290682E-8i -1.2718641861070453E-7+3.285029828798448E-8i 1.257426034267555E-8-3.4242049536833E-9i 6.42514033589249E-5 5.983112387714932E-4 4.442965436801526E-4 -3.873955238233213E-8+1.0441407941559835E-8i -1.1487492334224516E-7+2.9708809490429013E-8i -7.424576782892567E-10+7.168712662603081E-11i 1.2737843421144383E-4 5.681232676768291E-4 4.6958991388449E-4 -4.994085843360266E-8+1.3319629254368223E-8i -1.0692538226686695E-7+2.7586213356114573E-8i -7.915161979207656E-9+1.875697784388435E-9i 0 6.219341604067214E-4 4.1557418062678164E-4 -2.6830240178200704E-8+7.360669265005615E-9i -1.204894254568769E-7+3.122901530310536E-8i 8.192178668568452E-9-2.196707923144971E-9i 1.772475690678787E-4 6.219695435360065E-4 2.296563002027203E-4 -4.1166512903661994E-8+1.0928671678088215E-8i -8.104424723290884E-8+2.0810654729913826E-8i 7.095326839940602E-8-1.8571640764798843E-8i 1.816215500925714E-4 6.84237642...
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This document was uploaded on 01/24/2014.

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