H_75nm_L1_65um_D_4um

5668620323924304e 5 17438807466807205e 6

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Unformatted text preview: 3.719044975039858E-10i 5.78206586597337E-4 0 -4.7453255199836233E-4 8.654589461633266E-8-2.2342359706668882E-8i 3.161932251181664E-11-8.988888892019301E-12i 4.644420501009901E-9-1.5321170370495404E-9i 5.374774265599822E-4 4.5720678787802614E-5 -4.3398143976207794E-4 1.0391608872394461E-7-2.677400940001009E-8i 7.070379816234639E-9-1.7937023317197337E-9i 8.28461294306051E-9-2.5457961788034013E-9i 5.456211469457156E-4 -2.814151256379824E-5 -4.181132143850837E-4 1.0343360401184347E-7-2.6626237963786763E-8i -4.359506114850103E-9+1.1033820594080657E-9i 1.2869746969699912E-8-3.7221242959009016E-9i 5.513671077608037E-4 -6.390309389450305E-5 -5.01412711316931E-4 8.966648376826743E-8-2.318199097758823E-8i -8.327790075983858E-9+2.121532892974905E-9i -2.968628380469568E-9+4.176170061855839E-10i 4.2350815681449624E-4 1.9268648740124823E-4 -5.85676325869978E-4 9.580761994531206E-8-2.4930981512168524E-8i 3.3097314538866E-8-8.47555409212195E-9i -3.417321083389322E-8+8.474376545613013E-9i 5.289108078817869E-4 0 -5.289209367247938E-4 9.351279973391062E-8-2.4200275369749532E-8i 6.816828752957921E-11-1.816892693667924E-11i -1.0714391448848173E-8+2.399609188103286E-9i 4.981194613241718E-4 -6.499095413994654E-5 -5.542176270474404E-4 9.624299558829364E-8-2.4948078428094863E-8i -1.000159805770684E-8+2.5523174558599598E-9i -1.944272510113325E-8+4.648419813908192E-9i 4.946183508674696E-4 6.460250522971887E-6 -4.7195499582483493E-4 1.1648663437761586E-7-3.00748412307592E-8i 1.126481762789225E-9-2.8688072408592217E-10i -7.979553259763855E-9+1.586218614260701E-9i 4.745214741283006E-4 0 -5.782156779984367E-4 9.88573439299505E-8-2.565724022638667E-8i -9.433388674999791E-11+2.37956913163789E-11i -2.8608922347248608E-8+7.00613570953563E-9i 4.998175138727799E-4 6.411489831099311E-5 -5.5278904895141E-4 9.636037126920864E-8-2.497677514882655E-8i 9.820077545550687E-9-2.507725982603502E-9i -1.9294663155521797E-8+4.607690316810728E-9i 4.694091019528097E-4 7.490304229055346E-5 -5.02295640772736E-4 1.1680629099724561E-7-3.0220325081686444E-8i 1.4656962343058662E-8-3.733078104220585E-9i -1.8106728247230597E-8+4.2042041091126895E-9i 4.404436759978768E-4 6.74939591826091E-5 -6.007977477881666E-4 9.974468118102127E-8-2.5931614723891175E-8i 1.1762377059061651E-8-3.009205807518948E-9i -3.780949910624535E-8+9.387881105686714E-9i 4.406150449567934E-4 -6.610890904520598E-5 -6.008260932271295E-4 9.971423120547127E-8-2.592305405916697E-8i -1.1350159266215922E-8+2.9025488097788453E-9i -3.7796131667274016E-8+9.382953311450883E-9i 4.5270016771741347E-4 -9.180400542258693E-5 -5.264108872979072E-4 1.1531546442289566E-7-2.988095289824632E-8i -1.7852122226848515E-8+4.550533642058265E-9i -2.613083090338301E-8+6.28921138179008E-9i 4.025341445037552E-4 -1.309591629606788E-4 -6.167008676378426E-4 9.85081234797365E-8-2.566137327044899E-8i -2.3958694843508997E-8+6.13962006787836E-9i -4.6255021411775766E-8+1.1586011914771933E-8i 4.1556228319392346E-4 0 -6.219421100645388E-4 1.0072853873276825E-7-2.6218574672387093E...
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This document was uploaded on 01/24/2014.

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