H_75nm_L1_65um_D_4um

5704280915429124e 4 14619799876200714e 4

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Unformatted text preview: 1E-12i 9.734691981618967E-7-1.4276916663358953E-7i 2.3178059137504725E-4 -4.8753400495119014E-6 0 1.967799667143791E-9-3.2866768125833543E-9i -1.3997398097008039E-10+4.514732185435895E-11i 9.323734822344024E-7-1.5609841881317676E-7i 2.3411140760896428E-4 -7.362333532034065E-6 0 2.3125120535049857E-9-2.6025291509298427E-9i -1.4589706977922072E-10+3.02736439897299E-12i 9.073514556937111E-7-1.6120851639726744E-7i 2.3262891720703067E-4 -6.437499988016832E-6 -3.26976270593093E-6 3.692482315115116E-8+2.805747732874634E-9i -3.2603198105548214E-11-5.900033201457291E-10i 9.208360956761385E-7-1.604594833155896E-7i 2.338452816517755E-4 -1.5643819511557777E-6 -2.6777506247631988E-6 2.961193186581623E-8+1.2315967430987434E-9i -1.8035152838514194E-10-9.869792188360019E-11i 9.086428946121639E-7-1.6139215115448177E-7i 2.2241326966282977E-4 4.690603267067105E-5 0 2.0113140134011653E-9-7.024561728587629E-9i 4.49267342257929E-10+1.7302661627190025E-10i 1.1273802435326556E-6-1.04096176548485E-7i 2.216548593749167E-4 4.80822714296199E-5 -1.642831502032361E-6 7.878398745852168E-8+2.56782454123131E-8i -1.076354840783428E-9-8.743679185710258E-10i 1.1421306984146195E-6-9.883998297617284E-8i 2.2285761573920745E-4 4.431232717494699E-5 0 2.346786339220096E-9-6.37426470652996E-9i 4.086410096141766E-10+1.8683053429711707E-10i 1.109130673191399E-6-1.1182137070134418E-7i 2.2280557617505934E-4 4.5145526784468635E-5 -2.2244173824530487E-6 7.44194417958544E-8+2.07927352121641E-8i -1.0149019224815701E-9-9.267357488286672E-10i 1.0938593635674467E-6-1.193353708275334E-7i 2.2390613642900355E-4 4.1720602213275524E-5 -2.033600590689778E-6 5.716698360165772E-8+1.3328921890792598E-8i -1.0180589164927607E-9-7.707867056158593E-10i 1.065848620345854E-6-1.2906965666226197E-7i 2.246783706355153E-4 4.5672675769457285E-5 0 3.3651334845496126E-9-4.555794354675128E-9i 7.511835141081513E-11+8.757471465513565E-12i 1.0567337627301435E-6-1.2960545733434737E-7i 2.2093767842900787E-4 4.867377464476431E-5 0 -7.388785888380947E-9-1.5873149493471436E-8i 1.263460225700043E-9+7.079032511222993E-10i 1.198978865794755E-6-7.358599487762227E-8i 2.2264523461907741E-4 6.614915693131434E-5 0 4.817840189051287E-9-5.3839949651107324E-9i 3.8031280590378724E-10+1.1724913931714845E-10i 1.1113758013327756E-6-1.0209625639964165E-7i 2.2168383077789472E-4 6.417000300385123E-5 -1.3507581530664952E-6 7.175631420884218E-8+2.1349092076963175E-8i 1.3569135207225466E-9-3.1648121049288223E-10i 1.1419587626050555E-6-9.179055620122767E-8i 2.222250630965524E-4 7.837733996357278E-6 0 4.901319841182716E-9-4.241472317638022E-9i -3.1379827937515235E-10+1.5094300400703095E-9i 1.0823023283438687E-6-6.383036347252726E-8i 2.2301322498381675E-4 8.564993833145404E-6 -2.3467859274146807E-6 5.313411823123692E-8+3.8740668905578425E-8i 7.184524824415279E-10+1.1803223642867107E-8i 1.0498683859753098E-6-1.1047858498396666E-7i 2.274093675208771E-4 6.476359194112493E-6 0 2.8933768974939236E-9-3.166930619222935E-9i -2.6972216188001706E-10+4.2829092173470837E-10...
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