H_75nm_L1_65um_D_4um

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Unformatted text preview: 5629015E-8+2.3712485559942717E-8i 0 4.2311797267527814E-4 6.332501406751821E-4 -2.53486377761912E-9+7.541408136689993E-10i -1.8245875429912654E-8+4.729099245205784E-9i -1.510863108973546E-8+3.905245897678936E-9i 0 2.966543476566992E-4 7.161921674377029E-4 -3.0375082863240186E-10+1.0780248570371919E-10i -2.410039277870901E-9+6.248285454747193E-10i -3.708598257554979E-9+9.59647209521449E-10i -6.764409999683409E-5 3.2763874498922943E-4 6.992940501087514E-4 2.4476146263561077E-10-3.463071332398414E-11i -2.642996001150867E-9+6.855589671529176E-10i -3.504060024605601E-9+9.096644387442028E-10i 0 3.0185880989629045E-4 7.28756942305031E-4 -2.895471289056711E-11+1.5216744756137438E-11i -3.629870581874416E-10+9.428416975518429E-11i -5.602732542947112E-10+1.453617205427514E-10i -6.883083859326977E-5 3.333867931469352E-4 7.11562366777326E-4 5.315290695817857E-11-6.187472611590538E-12i -3.948664767567744E-10+1.0242558944865787E-10i -5.246103941133256E-10+1.365046766646944E-10i 0 3.070632721358814E-4 7.413217171723599E-4 -1.5826766610808919E-12+1.5656391107797393E-12i -2.7138356872039445E-11+7.220288649691428E-12i -4.4206453585260737E-11+1.1895690242901274E-11i 0 3.1226773437547284E-4 7.538864920396876E-4 -4.42350051812124E-19+6.579166545344256E-19i -8.606045512288293E-19+2.9522511575198773E-19i 1.8342554648513807E-19+1.1478283717492012E-19i -6.846785777628707E-5 5.168459439339163E-4 5.73687600258699E-4 2.0440160513436272E-10-2.8815419163019446E-11i -3.428291131249379E-9+8.893682402044635E-10i -1.6658329338077374E-9+4.329476314111784E-10i 0 5.481439419008307E-4 5.48154411600798E-4 -2.326439321104602E-10+8.32300426015593E-11i -3.415494620546103E-9+8.85601125226996E-10i -1.3005477026884097E-9+3.353242284629509E-10i -6.905979044138966E-5 4.5819033616262224E-4 6.214719633188407E-4 2.2585351709335067E-10-3.2596611896946826E-11i -3.291514868105266E-9+8.53853225181412E-10i -2.3280495875244805E-9+6.047391296929988E-10i 0 4.917768134418887E-4 5.992416919993351E-4 -2.5355382723572986E-10+9.053092261755247E-11i -3.3505008802430357E-9+8.687249371144872E-10i -1.9696641372478645E-9+5.088146281079338E-10i 0 3.654227159858367E-4 6.83667520167192E-4 -2.886609625119881E-10+1.0271189943945675E-10i -2.8342824838328854E-9+7.348411745324451E-10i -3.198916886780364E-9+8.275175083302609E-10i -6.94397680976649E-5 3.9348300018919173E-4 6.642923205702856E-4 2.440489642982889E-10-3.572501355518502E-11i -3.0228479157271402E-9+7.841220648525065E-10i -2.961936429971625E-9+7.691526702631468E-10i 0 4.3067365075876503E-4 6.445581789015243E-4 -2.7220621527629205E-10+9.702415288828364E-11i -3.155152531311449E-9+8.180442003073048E-10i -2.6126182167612326E-9+6.755002729062905E-10i 0 3.7183364082769296E-4 6.956616871876689E-4 -2.7345191947293917E-11+1.4461719676432135E-11i -4.264666450438043E-10+1.1077380671804398E-10i -4.833016285032855E-10+1.253821040318332E-10i -7.065800964323796E-5 4.003862107188267E-4 6.759465718083609E-4 5.203177567199879E-11-6.252583585177352E-12i -4.516958037613835E-10+1.171...
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This document was uploaded on 01/24/2014.

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