H_75nm_L1_65um_D_4um

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Unformatted text preview: 5E-6-1.2712029320782202E-7i 1.8557540584233104E-4 -9.479007262414826E-6 0 4.000291798506458E-8+2.2179342949965618E-8i 3.536787096937919E-7+1.2254113392398578E-7i 1.453170405226193E-6-3.3430573298960745E-7i 1.8791307667199433E-4 -7.943086061778528E-6 0 2.799174966392844E-8+1.5841504054246443E-8i 3.475212209362424E-7+1.1969664033240226E-7i 1.4838214021137E-6-3.0801488847761336E-7i 1.789341239757232E-4 1.0088697980118463E-5 -2.8936208332213346E-6 9.166125900269565E-8+1.5369343288642015E-8i -2.8892551534625655E-7-1.0642882828891106E-7i 1.5458882804794053E-6-3.452727339284599E-7i 2.0646375205209008E-4 6.915793814993201E-6 0 3.1781129882370775E-8+3.015822692975816E-8i -1.5151473542670773E-7+3.135702463175888E-8i 1.189718981391788E-6-3.308110098780632E-7i 2.045245333020254E-4 6.769642585691745E-6 0 2.7443162672113042E-8+2.311710642954422E-8i -1.7989827106505135E-7+3.6659409901576965E-9i 1.2319657899031615E-6-3.222162673077433E-7i 2.022040072074504E-4 -8.119306180200612E-6 -1.9854644775839768E-6 7.336466810717198E-8+3.514769014687236E-8i 1.4001959238148636E-7+1.275537090708326E-8i 1.2309484526814307E-6-3.1095392566852045E-7i 2.0496447734550158E-4 5.905388006132503E-6 -1.6392013222555965E-6 4.998276882851275E-8+2.453416271186129E-8i -9.55182090751409E-8+6.044525744777391E-9i 1.2375510929317054E-6-3.167846707720458E-7i 2.027070449838602E-4 8.688744687154603E-6 0 5.011671073236623E-8+3.987253046636372E-8i -1.8425652381728613E-7-1.2025211097042655E-8i 1.2051184376302715E-6-3.195240299848937E-7i 2.0310578533271764E-4 6.951324563429955E-6 -1.4656500116369216E-6 5.4921397531306714E-8+2.7757361065015686E-8i -1.3326307161824203E-7-7.466306124991458E-9i 1.2501034577619083E-6-3.1043151672232106E-7i 2.028575991795314E-4 6.093284516683607E-6 0 1.7051617236818454E-8+1.2817043315930417E-8i -2.0465809483973428E-7-1.882939001174948E-8i 1.307360997345653E-6-3.105261791651348E-7i 2.0333279375026362E-4 5.452817777257975E-6 -1.126669301956224E-6 3.5626251877817355E-8+1.5306446984742073E-8i -1.0392407955116165E-7-6.987573422255523E-9i 1.29930757130006E-6-3.067062694899093E-7i 2.002034960918271E-4 8.910548636814334E-6 0 4.830482820099161E-8+3.536997131664918E-8i -2.1319404462909348E-7-3.444263874364216E-8i 1.2364039951290183E-6-3.1941195687224406E-7i 1.9989111638547052E-4 7.73497346155836E-6 -1.8748092023052175E-6 6.619306865578034E-8+2.7647701852647625E-8i -1.59245629091734E-7-2.818325506516875E-8i 1.2787567799510202E-6-3.060253901455398E-7i 1.972198749441583E-4 9.474775778097609E-6 -1.5418698663718373E-6 7.346441020930285E-8+3.312743975289474E-8i -2.0078251620075665E-7-4.5771978320223096E-8i 1.273750207489383E-6-3.165762235787686E-7i 1.9499027699422105E-4 8.821877984590225E-6 0 4.09390344556293E-8+2.6329662687824942E-8i -2.710995515523204E-7-7.321295795125289E-8i 1.3215404862613847E-6-3.184968968058574E-7i 1.973827228265189E-4 8.656127312203389E-6 0 4.189189254237365E-8+2.8307464004139886E-8i -2.4963927820601284E-7-5.774685908251872E-8i 1.2868725424119024E-6-3.176508925376422E-7i 1.900283261388...
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This document was uploaded on 01/24/2014.

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