H_75nm_L1_65um_D_4um

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Unformatted text preview: 7-1.1340207436134935E-7i 2.237033234976514E-4 -1.141553377018558E-4 -1.7490197104509727E-6 4.568797447186939E-8+7.092184841372994E-9i -7.932472300249899E-9-7.841215840694027E-10i 9.402891891925049E-7-1.2258407204575686E-7i 2.259505463351338E-4 -1.1505182271897233E-4 0 3.2973796282551186E-9-4.807294750395248E-9i -5.358559561476469E-10+1.4312714945521887E-10i 8.971674349853248E-7-1.3312373296414867E-7i 2.250954204799058E-4 -1.1212137100853565E-4 0 1.6848104613226404E-9-5.876935746093288E-9i -4.722374634027923E-10+1.2403665623459054E-10i 9.244728602129495E-7-1.2806006196341727E-7i 2.23947038244291E-4 -1.1004338939497253E-4 -1.7549773645942575E-6 4.591293176805502E-8+7.248610738768216E-9i -7.45687401838271E-9-6.558053951234363E-10i 9.515445095636976E-7-1.221894365489363E-7i 2.2537643960686817E-4 -1.1220685601800091E-4 -2.616921208804275E-6 5.145572047987262E-8+6.8179500494946746E-9i -9.960256407355429E-9-5.703282134065847E-10i 9.098114901991387E-7-1.326792727620607E-7i 2.2585291851620452E-4 -1.0936444943386104E-4 0 2.033530580777618E-9-5.303746500930637E-9i -6.044595816084882E-10+4.552853082423538E-11i 9.184927535175582E-7-1.3142237339497697E-7i 2.2582448156562194E-4 -1.253365866281472E-4 0 2.505175936834414E-9-5.55136864472186E-9i -8.643329831156329E-10+1.628770229800125E-10i 8.586088733328013E-7-1.3692158261999414E-7i 2.2499002272303664E-4 -1.2778972716351186E-4 0 3.4392476722447385E-9-5.665285256542529E-9i -4.982817597854261E-10+3.3631675305508E-10i 8.615094984561979E-7-1.3519825391269892E-7i 2.2288414856231676E-4 -1.0837972592364877E-4 0 2.67999392880891E-9-6.80797433381851E-9i -8.466009802198202E-10-1.736214368889405E-10i 9.93347619291581E-7-1.101844170591829E-7i 2.2392583279950097E-4 -1.0699993526659972E-4 -1.8127833740550055E-6 4.722386602084705E-8+7.535703537819285E-9i -7.173933186538333E-9-5.153568616100097E-10i 9.622938461744388E-7-1.214955081838085E-7i 2.2274764856597065E-4 -1.0572168641966861E-4 0 2.1552422780818905E-9-7.0647064982242416E-9i -3.7938047200786995E-10+7.737235898716341E-11i 1.006920428071313E-6-1.0810532795781816E-7i 2.2563978948401232E-4 -1.0458867671012486E-4 0 2.7463539942912136E-9-4.973159758220857E-9i -4.923287161252236E-10+6.539879273356852E-11i 9.399658479032316E-7-1.2866086817402455E-7i 2.228717304345202E-4 -1.0332271938377413E-4 0 1.8995017611773968E-9-6.998716862343171E-9i -3.191992633752583E-10+7.383548820093234E-11i 1.0129005372966826E-6-1.08129217538111E-7i 2.2490574412786365E-4 -1.0698517965898198E-4 0 2.4216142396893405E-9-5.496777476937664E-9i -8.301810789160258E-10-9.483262699422346E-11i 9.447201755991355E-7-1.2644010921603055E-7i 9.21329670326129E-5 3.730505035830803E-6 0 3.0138387965598076E-9-5.971630198288678E-9i 4.494098446528487E-9+1.0798059222668955E-9i 4.847163095014201E-6-8.481080615474476E-7i 9.315525314115462E-5 4.156083533152237E-6 -1.731888144272493E-6 1.0367730991795063E-7-4.354871613495641E-8i -1.68849708328801E-7-1.0115456771069512E-7i 4.70666101573857E-6-8.852683698305294E-7i 8.798485895062583E-5 3.47591521...
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This document was uploaded on 01/24/2014.

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