H_75nm_L1_65um_D_4um

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Unformatted text preview: 790949329952E-7i 2.1186996774880858E-4 -1.185956962725015E-4 0 3.03886252878411E-7+1.4010597487708756E-7i -3.7666584692246195E-8-1.615675705872653E-8i 8.850654787071065E-7-2.017927904643968E-7i 2.1229823970138776E-4 -1.2256889634518174E-4 0 2.827347184286425E-7+1.3131196415191296E-7i -3.9486820908501933E-8-1.6984756147921722E-8i 8.767330611714466E-7-1.9640340971788805E-7i 2.112390605090716E-4 -1.2022085682591236E-4 -3.141015129989823E-6 2.5954472053291663E-7+1.0296370439956285E-7i -5.246418772404309E-8-1.728124149161392E-8i 8.823471291557439E-7-2.0088430725133828E-7i 2.131578152636531E-4 -1.256468395381345E-4 0 2.6855070171738387E-7+1.2619572222822048E-7i -3.739719847096927E-8-1.6175671105184994E-8i 8.780483113255726E-7-1.857751755895813E-7i 2.0972191715827243E-4 -1.2608012532938973E-4 0 2.4747904568277364E-7+1.1327220191455414E-7i -5.8819479932670456E-8-2.5262783532343607E-8i 8.442978930645813E-7-2.1790839646953297E-7i 2.1038686264797783E-4 -1.2371733543216056E-4 -3.372280320265826E-6 2.416480987633618E-7+9.362505669315891E-8i -6.08298738445824E-8-2.036072022645408E-8i 8.670927999594659E-7-2.0595830223179256E-7i 2.1405060633427893E-4 -1.240383584235508E-4 -3.469173011869127E-6 2.3031916848865816E-7+9.006079911655189E-8i -4.4142329785696706E-8-1.3351321848300892E-8i 8.957062693554228E-7-1.7301033433986983E-7i 2.123879143291849E-4 -1.2822685324837872E-4 0 2.4939197246786547E-7+1.1699085620533664E-7i -4.455866262200171E-8-1.9310847001577775E-8i 8.599199281989363E-7-1.9353958354795403E-7i 2.1219898133838748E-4 -1.302889385995344E-4 -3.700806840360151E-6 2.0412918161579942E-7+7.698110008264044E-8i -5.969564965279837E-8-1.9565317058851676E-8i 8.596350177428821E-7-1.882128529287213E-7i 2.1100712961968343E-4 -1.270987229021504E-4 -3.4445843854671323E-6 2.23865947701537E-7+8.611520605991967E-8i -6.195999737405996E-8-2.0806595399944575E-8i 8.606893727970623E-7-1.9971947887608602E-7i 2.034816256420275E-4 -1.280484457198994E-4 0 2.1203687379231612E-7+9.384006832829009E-8i -9.987091610238923E-8-4.252525578966161E-8i 8.222674244619152E-7-2.549916346233838E-7i 2.0683202568327392E-4 -1.3028675991873096E-4 -4.660135803138773E-6 2.0224231142529268E-7+6.8419225117488E-8i -9.089797386940726E-8-3.0746768562659585E-8i 8.426765347868017E-7-2.224783285372867E-7i 2.078890204142151E-4 -1.1136022573153063E-4 0 3.1584968515569665E-7+1.4098865779952257E-7i -4.801641050171528E-8-2.0611169531984455E-8i 8.690691420398188E-7-2.4171370833247786E-7i 2.1064308494737167E-4 -1.0843934069471563E-4 -3.144010937090698E-6 3.0558292450567457E-7+1.2180761679552875E-7i -4.2386542090827946E-8-1.3439372106527214E-8i 9.106621389694979E-7-2.1101511506828815E-7i 2.115280320835699E-4 -1.0978688828195131E-4 0 3.411394912897462E-7+1.557915868950462E-7i -3.1386130527531526E-8-1.3643452571341618E-8i 9.074172539549214E-7-2.0836442023225483E-7i 2.1206855619148934E-4 -1.1167585646451342E-4 -2.386612050492116E-6 3.013892363494262E-7+1.2548559267287365E-7i -3.828424942748285E-8-1.2769492588539821E-8i 9.171270222406257E-...
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This document was uploaded on 01/24/2014.

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