H_75nm_L1_65um_D_4um

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Unformatted text preview: 81271661E-5 6.380258331947989E-5 7.500000000000001E-8 1.0504398113337314E-6+5.050451393282731E-7i -6.617694847918268E-9-9.689471071454165E-9i 5.43673884753456E-6-1.0785303386603016E-6i 6.952803999406862E-5 6.400453632095522E-5 1.387377806848997E-6 4.683653251520703E-7+3.1583418763185543E-7i -3.321986401035211E-8+8.641431193442267E-9i 5.750492172275096E-6-9.804326750729315E-7i 6.786146901000076E-5 2.7830153829941985E-5 0 4.001508242275486E-9-3.140749419581224E-8i 9.32840199629232E-9-1.0912763998914224E-8i 6.982585719632365E-6-1.2500480305262061E-6i 6.78025011494644E-5 2.570140412947686E-5 1.257395395479421E-6 5.799661130936418E-9+1.1682062110127087E-7i -1.4868558783113443E-8+7.658573627057977E-9i 6.93344117564335E-6-1.3475862825540117E-6i 6.533687045322493E-5 2.773416392675134E-5 0 1.7042141916417952E-10-2.976052706591479E-8i 9.093460445855161E-10-3.0913739402736793E-9i 7.075011357599481E-6-1.4987943832224957E-6i 6.720806795515304E-5 2.9477117658006523E-5 0 -2.533317834770627E-8-2.7027522767512798E-8i 7.724550905181372E-9-5.995414428709094E-10i 6.9120059966483065E-6-1.3641986314859644E-6i 6.724924579347942E-5 3.127423964306697E-5 0 -1.705514033453913E-8-6.707903832700899E-8i -9.153557647581831E-10-9.192831463455644E-9i 6.8705276680221945E-6-1.344852762567237E-6i 6.784634441125964E-5 3.302515658152287E-5 0 -2.5050768952757296E-8-2.7356634393475127E-8i 6.3059616571977565E-9-3.779711665510965E-9i 6.858076603012992E-6-1.2397046472706556E-6i 6.817360267252476E-5 3.2270711694674217E-5 3.225664510633743E-7 6.417090510531243E-8+4.348311495490365E-8i 5.4338002701548314E-9+1.00108691711287E-8i 6.893509551810298E-6-1.1699755712038518E-6i 6.718132983004466E-5 3.467230564421032E-5 0 -6.318394639437397E-8-5.717574012930542E-8i 5.213134204410756E-9+7.941778497372012E-9i 6.785039202780522E-6-1.3292090247632222E-6i 6.899999999999998E-5 3.391586956368641E-5 0 5.665906356270895E-7-2.8192054516076923E-7i -2.77654141229887E-8+1.008581784100104E-8i 7.0376755830879835E-6-8.520727737271194E-7i 6.810067048916777E-5 3.41655464960339E-5 7.35210155110927E-8 1.5646483401965394E-7+4.0594992631315385E-8i -2.636991916667164E-8-5.1252185960526386E-8i 6.863626706047543E-6-1.1597739697342634E-6i 6.899999999999997E-5 3.370599219914834E-5 7.500000000000002E-8 1.5700540873727662E-8+1.8199153425045823E-7i 6.208966049203041E-9-8.389498542486079E-11i 7.16063284695731E-6-8.597438032822965E-7i 6.845173336203646E-5 3.29504121999131E-5 3.4671888371106997E-7 9.573591773850976E-8+8.102402506912632E-8i -7.40872920651503E-9-9.275504659483902E-9i 6.918329696655248E-6-1.0846919602791605E-6i 6.859344904032126E-5 3.4763453232234884E-5 7.666373860739834E-7 1.6690591049851075E-7+1.8189366160552235E-7i -2.036381287848102E-8-1.2722553226045003E-9i 6.8638220879877095E-6-1.1106993565293067E-6i 6.992986226768594E-5 2.7285434817028934E-5 1.2762563447775824E-6 4.277638568632447E-7+3.5341770290040743E-7i -5.980699482349405E-9+1.1427922186653626E-8i 6.658264456981411E-6-1.2999436451060994E-6i 7.072541677067838E-5...
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This document was uploaded on 01/24/2014.

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