H_75nm_L1_65um_D_4um

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Unformatted text preview: 65567710297437E-11i 1.0622693405711843E-6-1.0026790215243567E-7i 2.2245461970240638E-4 8.697295445738493E-5 0 9.59400276273672E-9-3.4521981764361485E-9i 1.2328475220592151E-9+4.904960731318208E-10i 1.076329081064992E-6-1.0037865520150698E-7i 2.2272872593821254E-4 8.956667907779355E-5 0 6.534875050716697E-9-4.72081038796738E-9i 1.6167737133137606E-9+6.891179175579943E-10i 1.0639425419635937E-6-1.0190568431808766E-7i 2.2074179260983583E-4 8.997133899700512E-5 1.1946765718728994E-6 -6.638517956801697E-8-3.6539864103724834E-8i -2.461644888196873E-9+2.49029395124498E-10i 1.1340840728772524E-6-8.008533544861858E-8i 2.2294787676382675E-4 9.452913068565935E-5 0 6.643423413420976E-9-4.846180180476487E-9i -3.8115602062737075E-10-3.4274762184243607E-10i 1.0429293452764788E-6-1.048393869408741E-7i 2.2290687134694431E-4 8.427271191769108E-5 0 1.0150086948092237E-8-2.4595840885887204E-9i -2.416629271931593E-10-2.7180521566963264E-10i 1.070799804430814E-6-1.0356585088206564E-7i 2.224086474278452E-4 9.63564609045132E-5 1.6950339525830856E-6 -5.624568486219489E-8-2.6990929791129495E-8i -5.529297149844794E-9-6.022019006184876E-10i 1.0409265806658548E-6-1.0813005981436129E-7i 2.255322135026341E-4 9.848322282821165E-5 0 7.641568817314657E-9-2.795704276259185E-9i 1.4081953691619962E-10-2.0249758452547008E-10i 9.605032202152624E-7-1.2715106539292535E-7i 2.2474174447299633E-4 9.583517022040372E-5 0 3.334867762918519E-9-5.212984306894963E-9i 1.306636582362121E-9+3.928897244638552E-10i 9.864249437150059E-7-1.2197999653045803E-7i 2.1636750932278937E-4 -5.865402710069407E-5 7.500000000000001E-8 -4.2911336372434523E-7-2.1829020398456322E-7i -6.425257109923715E-9-1.0319815462248028E-9i 1.1647320830800997E-6-1.3678112418488062E-7i 2.1555056818515353E-4 -6.516761694417593E-5 7.5E-8 -4.328726466303295E-7-2.1406905316385732E-7i -3.792352778759622E-9+1.9674861898380264E-10i 1.113889296670681E-6-1.606551877703915E-7i 2.1595986714959396E-4 -6.68133342756389E-5 7.500000000000001E-8 -4.384161119686931E-7-2.1686950100001442E-7i -2.439262929526076E-9+4.820720487491083E-10i 1.1362971667076303E-6-1.4663702779607805E-7i 2.162271892673034E-4 -6.428903896478366E-5 1.2846763917224973E-6 -3.7714405346366466E-7-1.8283472300565658E-7i -1.544680619571044E-9-1.443391350785923E-12i 1.1439497490204096E-6-1.4075259907517663E-7i 2.153760030323274E-4 -6.324707331880414E-5 7.500000000000001E-8 -4.270816235168659E-7-2.1235644012537399E-7i -5.469972035520785E-9-3.5624638182983616E-10i 1.1128304752245508E-6-1.6371971845051128E-7i 2.1602923026558076E-4 -6.173393463412045E-5 7.500000000000001E-8 -4.380128360245983E-7-2.1967568802124665E-7i -3.5991195782747147E-9+8.842011685304184E-11i 1.148810588560551E-6-1.4460962705583752E-7i 2.134832603721443E-4 -6.396517179622151E-5 7.5E-8 -4.179387440741781E-7-2.0417038484054563E-7i -6.312689753215318E-9+2.620733896179829E-10i 1.054022557998685E-6-2.0168119151647347E-7i 2.1240674462826608E-4 5.389112186857567E-5 7.5E-8 -3.939530253716988E-7-1.984392351699736E-7i 1.571378...
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This document was uploaded on 01/24/2014.

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