H_75nm_L1_65um_D_4um

70824833701206e 6 17825716073813955e 6

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Unformatted text preview: 0950439046301E-10i 8.699951715433358E-7-1.396319296182751E-7i 2.261327790243042E-4 1.1910622939679665E-4 0 4.185302215050522E-9-4.783139548535156E-9i 7.517010336671043E-10-1.31322519048363E-10i 8.784864718149306E-7-1.3535702257944877E-7i 2.303243635954873E-4 1.188754391440761E-4 -3.79039266476582E-6 4.5014456390216844E-8+5.371885110308351E-10i 1.2277851998686103E-8-1.3547725001030169E-11i 8.176700298259362E-7-1.4621414102604165E-7i 2.2672974930983684E-4 1.2060289620002017E-4 -4.606258348790878E-6 6.751613706485547E-8+6.847552439719317E-9i 1.743312368772405E-8+9.093653971029921E-10i 8.493816821493348E-7-1.4301920579708367E-7i 2.2820598396631174E-4 1.3127796297308087E-4 0 3.1953232918009563E-9-4.876923358677258E-9i 6.988574688483606E-10-4.735057568895266E-10i 8.049860769428973E-7-1.4406447329442284E-7i 2.266242971323363E-4 1.3162728542520787E-4 -4.704019578234494E-6 5.8849659019283276E-8+3.1582737892748656E-9i 1.9466003860274903E-8+1.177387169503481E-9i 8.101484927539976E-7-1.4567676801063394E-7i 2.279430306378568E-4 1.276524768744494E-4 0 2.654141817188139E-9-5.063321456598782E-9i 5.827974156004042E-10-4.2189468195050206E-10i 8.209176360925709E-7-1.4284030875741846E-7i 2.2872226152481222E-4 1.2833522761486788E-4 -3.8659727595745E-6 4.5404509289969316E-8+4.25182188758476E-10i 1.4399421598383068E-8+3.799569787044998E-10i 8.036315591530825E-7-1.4588163082946648E-7i 2.2251189349354746E-4 1.4717286232500957E-4 0 4.0004794688388615E-9-9.908142864392504E-9i 8.71102091962216E-10-1.303240087374702E-9i 8.000626858343808E-7-1.4305315754267327E-7i 2.2459398899751063E-4 1.4950766502747198E-4 0 3.135086820636586E-9-7.523682416040694E-9i 9.880795226919467E-10-1.9264593990447836E-9i 7.652750055593131E-7-1.4882205045932278E-7i 2.2578517312778342E-4 1.537301998086612E-4 0 2.7649417026493883E-9-5.915827137968565E-9i 1.1532305764635695E-9-2.7368534427492904E-9i 7.369788625398187E-7-1.5170704780644234E-7i 2.235914402977978E-4 1.5590699363866335E-4 0 3.402628978707231E-9-6.3679225187178445E-9i 1.9461128292642266E-9-3.918206966779109E-9i 7.442337622721312E-7-1.5256425245531446E-7i 2.2620337397127698E-4 1.512962331381683E-4 -2.482574169871672E-6 2.2499867623802943E-8-5.26927863180645E-9i 1.1312420114903512E-8-1.1546396338257573E-9i 7.420976147722946E-7-1.5022132110197772E-7i 2.177266845089137E-4 1.6039131988490813E-4 0 2.6162752795615294E-9-3.8458851642490024E-9i 2.922159122604092E-9-5.95553859854424E-9i 7.668790394787841E-7-1.5636500169004022E-7i 2.1916287833416293E-4 1.5974593358249195E-4 -2.7295751572783978E-6 2.247971853601585E-8-4.761781935693185E-9i 1.5861805623638255E-8-3.3284895320341125E-9i 7.574856405818077E-7-1.548418785085493E-7i 2.1486864535292063E-4 1.567866552409544E-4 0 2.4171300251416236E-9-2.8497913051363697E-9i 6.248392755026783E-9-1.4449346107635319E-8i 8.178264384586451E-7-1.4819086343864177E-7i 2.1405345665981933E-4 1.5639386556698265E-4 -1.4370972852725102E-6 1.815696513821942E-8-5.213272508331244E-10i 2.378966478646133E-8-2.970944100888355E-9i 8.251951052357...
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This document was uploaded on 01/24/2014.

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