H_75nm_L1_65um_D_4um

711176735128208e 8i 11153420437179166e

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Unformatted text preview: 161132219547462E-4i -1.590999168568137E-4 -6.086843489168958E-6 1.167577333647191E-6 3.905982012608611E-6-1.1257221669709732E-6i 2.3196605649317893E-4-2.4099036510667876E-5i -5.743764188451027E-4+1.0980766290196782E-4i -1.5022321491076147E-4 -4.18780592037246E-6 1.150208763966812E-6 2.9584179500454755E-6-5.423363882376547E-7i 7.26971288985844E-5-7.003046465131294E-6i -5.921491287737855E-4+1.0592816068089271E-4i -1.5049385072947682E-4 -4.069492506422473E-6 9.879769895648714E-8 -1.4365304491670283E-5+9.006252872090226E-7i 4.330399011653885E-5-4.506946963855896E-6i -6.383660175179814E-4+1.0934024714238932E-4i -1.4512859796413628E-4 -3.9266239787697685E-6 1.1998753718179304E-6 6.826464785284935E-7-1.517157712629694E-7i 6.087096641768936E-5-6.022997710199278E-6i -5.747177357115547E-4+1.0387810094472775E-4i -1.4529358593828943E-4 -4.0586057560937315E-6 9.749376859089653E-8 -1.0231064204391238E-5+6.144730340107429E-7i 3.128360389070828E-5-3.1456182401079502E-6i -6.332583017513507E-4+1.0841927488651482E-4i -1.3703651476440725E-4 3.6552325485848314E-6 0 -1.1620720167943022E-6+1.2260399040773765E-7i 2.0063007179502372E-5-1.3849879657664625E-6i -5.90315003975866E-4+1.0551371169735642E-4i -1.3618598481818006E-4 4.999999999999999E-6 0 1.964610976901149E-6-1.7650884654579757E-7i -4.412712162049638E-5+9.271038329301514E-6i -7.660263389615007E-4+1.2010153367736365E-4i -1.3791755451412728E-4 4.9999999999999996E-6 0 6.181174495788438E-7-1.6178680970237532E-8i -3.205500715605135E-5+8.060379906578638E-6i -7.61567435107588E-4+1.177719806681925E-4i -1.3445441512223286E-4 4.9999999999999996E-6 0 -5.3917229057465655E-6+4.350456469025702E-7i -2.5880624969042168E-5+6.565733188014271E-6i -7.574763569042676E-4+1.1949783563441286E-4i -1.3099127573033847E-4 4.999999999999999E-6 0 -8.717107683523656E-6+5.347440429695482E-7i -6.292766848845817E-5+1.0448503872709824E-5i -7.687935343705377E-4+1.2292014757475656E-4i -1.327228454262857E-4 5.0E-6 0 1.048442512576666E-5-7.050714156498929E-7i -4.355713915990338E-5+9.174975957221343E-6i -7.69381641395582E-4+1.2019468127513336E-4i -1.3531691433928776E-4 3.115798860845436E-6 0 5.250603796873183E-6-4.864468298726443E-7i 1.888929466196575E-5-1.681711450550839E-6i -5.718651205166989E-4+1.0401318650471377E-4i -1.3732528422739562E-4 3.878157566316487E-6 1.4660920938193765E-6 -3.1051578754381914E-6+4.7267161462083427E-7i -6.880205176572618E-5+6.921048358277115E-6i -5.65844316754427E-4+1.0346025207070841E-4i -1.3057663273239548E-4 -1.5059583224250842E-6 0 8.017302685171434E-7-1.6479859181335724E-7i -7.156554846358838E-7+5.195611562193069E-8i -5.39897792069936E-4+1.0167751402988095E-4i -1.3373628101672814E-4 1.8463335564002637E-6 3.1777158327275614E-6 -3.288024313626795E-6+9.072846465954347E-7i -3.301870360333369E-5+3.7993750175340305E-6i -5.012930937627586E-4+9.655297138055135E-5i -1.3456751669599964E-4 1.0868917497248941E-6 0 -3.480486864641345E-7-3.2778714680819434E-8i -1.2079744145397795E-7+2.413736961538583E-8i -5.323700385096382E-4+9.992148426460...
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This document was uploaded on 01/24/2014.

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