H_75nm_L1_65um_D_4um

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Unformatted text preview: 73031695E-7i 3.439425689593893E-5-8.970599573252663E-6i -2.1846224338658386E-4 -1.2095257879409793E-4 1.1631303289512894E-6 2.2290518748125515E-5-5.012885885320224E-6i 2.0089016203141936E-6-5.643383760527238E-7i 4.5836398043761634E-5-1.1860462325087837E-5i -2.1704225215346155E-4 -1.2120929733255048E-4 7.5E-8 3.5476657807759215E-5-7.952814401585635E-6i 2.2052169452311778E-6-5.907803187569135E-7i 3.762849799454278E-5-1.0487538071790865E-5i -1.0084116917192653E-4 -1.412624798388188E-4 7.500000000000001E-8 -9.023653558473826E-6+2.681222902559543E-6i 2.6661693712937535E-5-7.135323009353767E-6i 1.4114019223720728E-5-4.831672803671566E-6i -1.2971624855934584E-4 -1.3525372871131785E-4 7.5E-8 -4.636881457473453E-6+1.5614588137325185E-6i 4.087997951213908E-5-1.2186348897436083E-5i 9.318377998242434E-6-3.1402437461131497E-6i -1.243332830787692E-4 -1.3502450519827641E-4 7.500000000000001E-8 -6.441656297684833E-6+2.130882147650156E-6i 3.9368170590410416E-5-1.167952789462212E-5i 9.386974436048459E-6-3.1931797103069174E-6i -1.2068199142878022E-4 -1.3678689082211E-4 7.500000000000001E-8 -6.938007389801552E-6+2.262836596526948E-6i 3.760238481927505E-5-1.098681930721573E-5i 1.0677080955189783E-5-3.6570114208143902E-6i -1.2227619541954726E-4 -1.3305669238808943E-4 2.9698124860464345E-6 -7.624143673654622E-6+2.494732909434172E-6i 3.746469910206874E-5-1.1105270182044607E-5i 8.366381610601935E-6-2.705685157885948E-6i -1.2022154455632673E-4 -1.3260243201995478E-4 7.5E-8 -8.709444763533963E-6+2.862169295202166E-6i 3.84987684395266E-5-1.1486305633240379E-5i 8.209586932396245E-6-2.800112269628815E-6i -1.2566493422282025E-4 -1.3066599605891135E-4 7.500000000000001E-8 -7.377438717710155E-6+2.4720717495664223E-6i 4.107502790443877E-5-1.2443248910144885E-5i 6.70316236018151E-6-2.2196791759931466E-6i -7.456515653023838E-5 -7.465753363349006E-5 7.500000000000001E-8 -1.1306350755519609E-4+3.003085094259797E-5i 1.6008103855954486E-5-4.058967610626284E-6i 7.153262504309162E-5-2.1222362515958632E-5i -7.551281373877321E-5 -7.303733570423733E-5 7.500000000000002E-8 -1.1682464665609757E-4+3.1429271805993864E-5i 1.9250819239268292E-5-4.912965403853674E-6i 6.675520646009749E-5-2.0010124783097317E-5i -1.2000736495620906E-4 -1.2603506447153657E-4 7.5E-8 -1.1480673786215219E-5+3.8098486080163597E-6i 4.0769794596206875E-5-1.243873027722503E-5i 4.955604830305831E-6-1.5711269013595165E-6i -7.740895557525675E-5 -9.170706847971495E-5 7.500000000000002E-8 -7.245534144135248E-5+1.9776056222319675E-5i 1.5577205275052985E-5-4.1753651397018775E-6i 4.0277042778035306E-5-1.2520030289273435E-5i -7.552463189947227E-5 -9.337444103445463E-5 7.500000000000001E-8 -7.069550253114965E-5+1.878121418048057E-5i 1.1819129788919685E-5-3.126925499974398E-6i 4.548848058541363E-5-1.387237688870891E-5i -7.732035480906871E-5 -8.842526333564315E-5 7.500000000000001E-8 -7.869537280939069E-5+2.1502687609141943E-5i 1.662489737504676E-5-4.4309977670723795E-6i 4.3274243878835806E-5-1.337722156332628E-5i -7.792453133164849E-5 -9.9...
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