H_75nm_L1_65um_D_4um

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Unformatted text preview: 66E-7i -1.0731309415931304E-6-3.7870444653710047E-7i 9.317786039766101E-5-2.2346998397277594E-5i 5.702841993152457E-6 5.0269912031108155E-6 -3.6731393557206133E-7 3.5116520693103803E-6-1.1681666924311777E-6i 1.005264806782678E-6-8.117371449850176E-7i 8.800690963947117E-5-2.081168568180156E-5i 5.391843037592531E-6 5.6654118155403445E-6 -4.790657915178411E-7 4.365682527798345E-6-1.39289586526896E-6i 8.681650016327662E-7-5.60247510103781E-7i 8.952012699790878E-5-2.1432293819899055E-5i 8.492519750159892E-6 4.062330826530512E-6 0 -8.583908276165619E-7-5.13697409359097E-7i -7.493465393133313E-7-4.334207713257159E-7i 6.769195445419757E-5-1.6479156806374664E-5i 8.137448808772576E-6 3.4200342858154073E-6 -3.5513550043406746E-7 2.2259611756535433E-6-1.225316640972181E-6i 2.717298019068795E-7-6.136219380077256E-7i 7.146408691180769E-5-1.6768550568426386E-5i 8.370969802938982E-6 3.4501558710234752E-6 -6.964471910765327E-7 4.277340022617833E-6-1.5452010473955588E-6i 4.389031119572752E-7-4.868655684499164E-7i 6.902487040297877E-5-1.6378645492658983E-5i 8.847377606604309E-6 3.2893758878993725E-6 0 -1.0100234862187053E-6-6.318495423745695E-7i -7.096330259584512E-7-4.208539595410515E-7i 6.648699946783574E-5-1.603763351302592E-5i 7.883940035826882E-6 3.578217487403724E-6 0 -9.521195782933766E-7-8.102006144500044E-7i -9.827375592984441E-7-7.093310129529576E-7i 7.541714542266667E-5-1.7527791053887437E-5i 8.038122257874262E-6 3.898363919776299E-6 -4.554900703793276E-7 2.7929302477104016E-6-1.2438785972467697E-6i 1.9044437596805325E-7-5.562104244171209E-7i 7.11267395930356E-5-1.691304599715955E-5i 8.303890377853779E-6 3.268844970601746E-6 0 -1.6314075778325366E-6-6.848466859659167E-7i -1.2757712000264696E-6-5.051215163575924E-7i 7.091374582018632E-5-1.6709692172739852E-5i 8.66134105574529E-6 2.8157510815314684E-6 0 -1.7255899507011394E-6-7.407247779079654E-7i -1.0118291729085916E-6-4.589742410607285E-7i 6.906685579937201E-5-1.6277969530238472E-5i 8.722552280045771E-6 2.9442618577990226E-6 -4.2197760731222966E-7 2.338521462634327E-6-1.2541956769433342E-6i 1.0185228583851808E-7-4.512033627476075E-7i 6.77003363673645E-5-1.6025392109767442E-5i 7.683516906113942E-6 4.085533149674883E-6 0 -1.238911949633624E-6-5.602321823404826E-7i -1.3780003455609046E-6-5.761511306428291E-7i 7.382080698333045E-5-1.7556613256318237E-5i 7.667954224678987E-6 3.627810322366037E-6 -4.314124186864778E-7 3.6667016160365574E-6-1.4169996076221145E-6i 9.96051491815135E-7-7.253384205819537E-7i 7.397798430235913E-5-1.7226568594548575E-5i 6.137460155228323E-6 4.999999999999999E-6 0 -9.214045610580571E-7-3.008608457112187E-7i -1.932229168330499E-6-5.153721719805188E-7i 8.52171615206686E-5-2.028735394142022E-5i 4.959146264362191E-6 4.9999999999999996E-6 0 6.421907120763747E-7-3.8924964505268106E-7i 1.8781616863423258E-6-1.2784525417147192E-6i 1.0473858233118358E-4-2.4606427040864785E-5i 5.137093428319908E-6 4.964380071856016E-6 -3.1999413581957363E-7 3.8185397624034E-6-1.159963942087607E-6i 2.9283167624649288E-6-1.1997...
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This document was uploaded on 01/24/2014.

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